Otto LACH

Person

TREFFEN, AT

People

Patents Grantslast 30 patents

Information Patent Grant
Device and method for processing wafer-shaped articles
- Patent number 9,484,229
- Issue date Nov 1, 2016
- Lam Research AG
- Otto Lach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for liquid treatment of wafer shaped articles
- Patent number 9,355,883
- Issue date May 31, 2016
- Lam Research AG
- Karl-Heinz Hohenwarter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Grounded chuck
- Patent number 9,190,310
- Issue date Nov 17, 2015
- Lam Research AG
- Michael Brugger
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus for liquid treatment of wafer shaped articles
- Patent number 9,147,593
- Issue date Sep 29, 2015
- Lam Research AG
- Otto Lach
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Device for holding wafer shaped articles
- Patent number 9,130,002
- Issue date Sep 8, 2015
- Lam Research AG
- Dieter Frank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for liquid treatment of wafer shaped articles
- Patent number 9,093,482
- Issue date Jul 28, 2015
- Lam Research AG
- Michael Brugger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High temperature chuck and method of using same
- Patent number 8,613,288
- Issue date Dec 24, 2013
- Lam Research AG
- Michael Brugger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reinforced pin for being used in a pin chuck, and a pin chuck using...
- Patent number 8,608,146
- Issue date Dec 17, 2013
- Lam Research AG
- Michael Brugger
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20140102637
- Publication date Apr 17, 2014
- LAM RESEARCH AG
- Michael BRUGGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20140097580
- Publication date Apr 10, 2014
- LAM RESEARCH AG
- Otto LACH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20130118535
- Publication date May 16, 2013
- LAM RESEARCH AB
- Otto LACH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20130061873
- Publication date Mar 14, 2013
- LAM RESEARCH AG
- Karl-Heinz HOHENWARTER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES
- Publication number 20120305036
- Publication date Dec 6, 2012
- LAM RESEARCH AG
- Otto LACH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR HOLDING WAFER SHAPED ARTICLES
- Publication number 20110272874
- Publication date Nov 10, 2011
- LAM RESEARCH AG
- Dieter FRANK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GROUNDED CHUCK
- Publication number 20110254236
- Publication date Oct 20, 2011
- LAM RESEARCH AG
- Michael BRUGGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REINFORCED PIN FOR BEING USED IN A PIN CHUCK, AND A PIN CHUCK USING...
- Publication number 20110148022
- Publication date Jun 23, 2011
- LAM RESEARCH AG
- Michael BRUGGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH TEMPERATURE CHUCK AND METHOD OF USING SAME
- Publication number 20110146728
- Publication date Jun 23, 2011
- LAM RESEARCH AG
- Michael BRUGGER
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Device and method for processing wafer-shaped articles

Method and apparatus for liquid treatment of wafer shaped articles

Grounded chuck

Apparatus for liquid treatment of wafer shaped articles

Device for holding wafer shaped articles

Method and apparatus for liquid treatment of wafer shaped articles

High temperature chuck and method of using same

Reinforced pin for being used in a pin chuck, and a pin chuck using...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES

APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES

DEVICE AND METHOD FOR PROCESSING WAFER-SHAPED ARTICLES

METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES

DEVICE FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES

DEVICE FOR HOLDING WAFER SHAPED ARTICLES

GROUNDED CHUCK

REINFORCED PIN FOR BEING USED IN A PIN CHUCK, AND A PIN CHUCK USING...

HIGH TEMPERATURE CHUCK AND METHOD OF USING SAME