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Padma Gopalakrishnan
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Methods for controlling clamping of insulator-type substrate on ele...
Patent number
10,923,379
Issue date
Feb 16, 2021
Lam Research Corporation
Chin-Yi Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Life enhancement of ring assembly in semiconductor manufacturing ch...
Patent number
9,960,019
Issue date
May 1, 2018
Applied Materials, Inc.
Sandhya Arun
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Surface annealing of components for substrate processing chambers
Patent number
9,481,608
Issue date
Nov 1, 2016
Applied Materials, Inc.
Ashish Bhatnagar
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Retaining ring with attachable segments
Patent number
9,227,297
Issue date
Jan 5, 2016
Applied Materials, Inc.
Irfanulla Khuddus Rahmathullah
B24 - GRINDING POLISHING
Information
Patent Grant
Two-part retaining ring with interlock features
Patent number
9,168,631
Issue date
Oct 27, 2015
Applied Materials, Inc.
Irfanulla Khuddus Rahmathullah
B24 - GRINDING POLISHING
Information
Patent Grant
Life enhancement of ring assembly in semiconductor manufacturing ch...
Patent number
8,740,206
Issue date
Jun 3, 2014
Applied Materials, Inc.
Sandhya Arun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Localized surface annealing of components for substrate processing...
Patent number
8,617,672
Issue date
Dec 31, 2013
Applied Materials, Inc.
Ashish Bhatnagar
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Methods for Controlling Clamping of Insulator-Type Substrate on Ele...
Publication number
20180233393
Publication date
Aug 16, 2018
LAM RESEARCH CORPORATION
Chin-Yi Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RETAINING RING WITH ATTACHABLE SEGMENTS
Publication number
20140287662
Publication date
Sep 25, 2014
Irfanulla Khuddus Rahmathullah
B24 - GRINDING POLISHING
Information
Patent Application
LIFE ENHANCEMENT OF RING ASSEMBLY IN SEMICONDUCTOR MANUFACTURING CH...
Publication number
20140238604
Publication date
Aug 28, 2014
Sandhya ARUN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SURFACE ANNEALING OF COMPONENTS FOR SUBSTRATE PROCESSING CHAMBERS
Publication number
20140167327
Publication date
Jun 19, 2014
Applied Materials, Inc.
Ashish Bhatnagar
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
TWO-PART RETAINING RING WITH INTERLOCK FEATURES
Publication number
20130324017
Publication date
Dec 5, 2013
Irfanulla Khuddus Rahmathullah
B24 - GRINDING POLISHING
Information
Patent Application
Two-Part Plastic Retaining Ring
Publication number
20130035022
Publication date
Feb 7, 2013
Young J. Paik
B24 - GRINDING POLISHING
Information
Patent Application
HIGH EFFICIENCY ELECTROSTATIC CHUCK ASSEMBLY FOR SEMICONDUCTOR WAFE...
Publication number
20120154974
Publication date
Jun 21, 2012
Applied Materials, Inc.
Ashish Bhatnagar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIFE ENHANCEMENT OF RING ASSEMBLY IN SEMICONDUCTOR MANUFACTURING CH...
Publication number
20110180983
Publication date
Jul 28, 2011
Applied Materials, Inc.
SANDHYA ARUN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Localized surface annealing of components for substrate processing...
Publication number
20070014949
Publication date
Jan 18, 2007
APPLIED MATERIALS, INC.
Ashish Bhatnagar
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR