Padmanaban Krishnaraj

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San Francisco, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Cleaning residues from surfaces in a chamber by sputtering sacrific...
- Patent number 6,814,814
- Issue date Nov 9, 2004
- Applied Materials, Inc.
- Alan W. Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Directing a flow of gas in a substrate processing chamber
- Patent number 6,450,117
- Issue date Sep 17, 2002
- Applied Materials, Inc.
- Laxman Murugesh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Cleaning residues from surfaces in a chamber by sputtering sacrific...
- Publication number 20030183243
- Publication date Oct 2, 2003
- APPLIED MATERIALS, INC.
- Alan W. Collins
- B08 - CLEANING