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Palanivel BALASUBRAMANIAM
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Singapore, SG
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Patents Grants
last 30 patents
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Patent Grant
Modifying growth rate of a device layer
Patent number
8,633,081
Issue date
Jan 21, 2014
GLOBALFOUNDRIES Singapore Pte. Ltd.
Chunshan Yin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming PLDD structure with minimized lateral dopant dif...
Patent number
6,312,999
Issue date
Nov 6, 2001
Chartered Semiconductor Manufacturing Ltd.
Subrahamanyam Chivukula
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to form a smooth gate polysilicon sidewall in the fabricatio...
Patent number
6,200,887
Issue date
Mar 13, 2001
Chartered Semiconductor Manufacturing Ltd.
Palanivel Balasubramaniam
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
MODIFYING GROWTH RATE OF A DEVICE LAYER
Publication number
20120168895
Publication date
Jul 5, 2012
GLOBALFOUNDRIES SINGAPORE PTE. LTD.
Chunshan YIN
H01 - BASIC ELECTRIC ELEMENTS