Pamanabhan Krishnaraj

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San Francisco, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Chamber cleaning with fluorides of iodine
- Patent number 6,581,612
- Issue date Jun 24, 2003
- Applied Materials Inc.
- Peter Loewenhardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...