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Pamela R. Patterson
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Palo Alto, CA, US
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last 30 patents
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Patent Grant
Method for controlling a collimated sputtering source
Patent number
5,478,455
Issue date
Dec 26, 1995
Varian Associates, Inc.
Geri M. Actor
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...