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Pankaj G. Ramnani
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Tigard, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Showerhead with air-gapped plenums and overhead isolation gas distr...
Patent number
10,745,806
Issue date
Aug 18, 2020
Lam Research Corporation
Nagraj Shankar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Showerhead with air-gapped plenums and overhead isolation gas distr...
Patent number
10,472,716
Issue date
Nov 12, 2019
Lam Research Corporation
Nagraj Shankar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
INTEGRATION OF FULLY ALIGNED VIA THROUGH SELECTIVE DEPOSITION AND R...
Publication number
20240030062
Publication date
Jan 25, 2024
LAM RESEARCH CORPORATION
Dennis M. Hausmann
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FACELESS SHOWERHEAD
Publication number
20230366089
Publication date
Nov 16, 2023
Lam Research Corporation
Shriram Vasant Bapat
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTR...
Publication number
20200063261
Publication date
Feb 27, 2020
LAM RESEARCH CORPORATION
Nagraj Shankar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTR...
Publication number
20190352777
Publication date
Nov 21, 2019
LAM RESEARCH CORPORATION
Nagraj Shankar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...