Panya Wongsenakhum

Person

San Francisco, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for purging semiconductor process chamber slit valve opening
- Patent number 10,872,787
- Issue date Dec 22, 2020
- Lam Research Corporation
- Panya Wongsenakhum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas inlet valve with incompatible materials isolation
- Patent number 10,132,413
- Issue date Nov 20, 2018
- Lam Research Corporation
- Gary Bridger Lind
- G05 - CONTROLLING REGULATING
Information Patent Grant
Azimuthal mixer
- Patent number 10,113,232
- Issue date Oct 30, 2018
- Lam Research Corporation
- Panya Wongsenakhum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for purging semiconductor process chamber slit valve opening
- Patent number 10,090,174
- Issue date Oct 2, 2018
- Lam Research Corporation
- Panya Wongsenakhum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hybrid impedance matching for inductively coupled plasma system
- Patent number 9,918,376
- Issue date Mar 13, 2018
- Lam Research Corporation
- George Thomas
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Hybrid impedance matching for inductively coupled plasma system
- Patent number 9,082,589
- Issue date Jul 14, 2015
- Novellus Systems, Inc.
- George Thomas
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods and apparatus for cleaning deposition reactors
- Patent number 8,262,800
- Issue date Sep 11, 2012
- Novellus Systems, Inc.
- Panya Wongsenakhum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for improving uniformity and resistivity of thin tungsten f...
- Patent number 8,101,521
- Issue date Jan 24, 2012
- Novellus Systems, Inc.
- Juwen Gao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for growing low-resistivity tungsten film
- Patent number 8,048,805
- Issue date Nov 1, 2011
- Novellus Systems, Inc.
- Lana Hiului Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reducing silicon attack and improving resistivity of tungsten nitri...
- Patent number 7,754,604
- Issue date Jul 13, 2010
- Novellus Systems, Inc.
- Panya Wongsenakhum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for improving uniformity and resistivity of thin tungsten f...
- Patent number 7,655,567
- Issue date Feb 2, 2010
- Novellus Systems, Inc.
- Juwen Gao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for growing low-resistivity tungsten film
- Patent number 7,589,017
- Issue date Sep 15, 2009
- Novellus Systems, Inc.
- Lana Hiului Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming low-resistivity tungsten interconnects
- Patent number 7,262,125
- Issue date Aug 28, 2007
- Novellus Systems, Inc.
- Panya Wongsenakhum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for reducing tungsten film roughness and improving step cove...
- Patent number 7,141,494
- Issue date Nov 28, 2006
- Novellus Systems, Inc.
- Sang-Hyeob Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HYBRID SHOWERHEAD WITH SEPARATE FACEPLATE FOR HIGH TEMPERATURE PROCESS
- Publication number 20240295026
- Publication date Sep 5, 2024
- LAM RESEARCH CORPORATION
- Lipyeow YAP
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION WITH MULTIPLE UNIFORMLY HEATED CHARGE VOLUMES
- Publication number 20240110279
- Publication date Apr 4, 2024
- LAM RESEARCH CORPORATION
- Nitin KADAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBLIMATION CONTROL USING DOWNSTREAM PRESSURE SENSING
- Publication number 20230399741
- Publication date Dec 14, 2023
- LAM RESEARCH CORPORATION
- Marvin Clayton BREES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AXIALLY COOLED METAL SHOWERHEADS FOR HIGH TEMPERATURE PROCESSES
- Publication number 20230383406
- Publication date Nov 30, 2023
- LAM RESEARCH CORPORATION
- Lipyeow YAP
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATER DESIGN SOLUTIONS FOR CHEMICAL DELIVERY SYSTEMS
- Publication number 20230175128
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- Davinder Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR ACCUMULATOR FOR CORROSIVE GASES WITH PURGING
- Publication number 20220213599
- Publication date Jul 7, 2022
- LAM RESEARCH CORPORATION
- Gary Bridger Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PURGING SEMICONDUCTOR PROCESS CHAMBER SLIT VALVE OPENING
- Publication number 20190019696
- Publication date Jan 17, 2019
- LAM RESEARCH CORPORATION
- Panya Wongsenakhum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR MANIFOLD WITH INTEGRATED VAPOR CONCENTRATION SENSOR
- Publication number 20170342562
- Publication date Nov 30, 2017
- LAM RESEARCH CORPORATION
- Gary Bridger Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PURGING SEMICONDUCTOR PROCESS CHAMBER SLIT VALVE OPENING
- Publication number 20170256424
- Publication date Sep 7, 2017
- LAM RESEARCH CORPORATION
- Panya Wongsenakhum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CORROSION RESISTANT GAS DISTRIBUTION MANIFOLD WITH THERMALLY CONTRO...
- Publication number 20160343595
- Publication date Nov 24, 2016
- LAM RESEARCH CORPORATION
- Gary Bridger Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INLET VALVE WITH INCOMPATIBLE MATERIALS ISOLATION
- Publication number 20160319938
- Publication date Nov 3, 2016
- LAM RESEARCH CORPORATION
- Gary Bridger Lind
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
AZIMUTHAL MIXER
- Publication number 20160032456
- Publication date Feb 4, 2016
- LAM RESEARCH CORPORATION
- Panya Wongsenakhum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYBRID IMPEDANCE MATCHING FOR INDUCTIVELY COUPLED PLASMA SYSTEM
- Publication number 20150313000
- Publication date Oct 29, 2015
- Novellus Systems, Inc.
- George Thomas
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HYBRID IMPEDANCE MATCHING FOR INDUCTIVELY COUPLED PLASMA SYSTEM
- Publication number 20140097751
- Publication date Apr 10, 2014
- George Thomas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CLEANING DEPOSITION CHAMBERS
- Publication number 20140069459
- Publication date Mar 13, 2014
- Yan Guan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTAL WITH EDGE GAS DEFLECTOR FOR EDGE PROFILE CONTROL
- Publication number 20130000848
- Publication date Jan 3, 2013
- NOVELLUS SYSTEMS INC.
- Panya Wongsenakhum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR GROWING LOW-RESISTIVITY TUNGSTEN FILM
- Publication number 20100035427
- Publication date Feb 11, 2010
- Novellus Systems, Inc.
- Lana Hiului Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for growing low-resistivity tungsten film
- Publication number 20080124926
- Publication date May 29, 2008
- Novellus Systems, Inc.
- Lana Hiului Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reducing silicon attack and improving resistivity of tungsten nitri...
- Publication number 20080045010
- Publication date Feb 21, 2008
- Novellus Systems, Inc.
- Panya Wongsenakhum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for reducing tungsten film roughness and improving step cove...
- Publication number 20050031786
- Publication date Feb 10, 2005
- Novellus Systems, Inc.
- Sang-Hyeob Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming low-resistivity tungsten interconnects
- Publication number 20040202786
- Publication date Oct 14, 2004
- Novellus Systems, Inc.
- Panya Wongsenakhum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Panya Wongsenakhum

Person

Patents Grantslast 30 patents

Apparatus for purging semiconductor process chamber slit valve opening

Gas inlet valve with incompatible materials isolation

Azimuthal mixer

Apparatus for purging semiconductor process chamber slit valve opening

Hybrid impedance matching for inductively coupled plasma system

Hybrid impedance matching for inductively coupled plasma system

Methods and apparatus for cleaning deposition reactors

Methods for improving uniformity and resistivity of thin tungsten f...

Methods for growing low-resistivity tungsten film

Reducing silicon attack and improving resistivity of tungsten nitri...

Methods for improving uniformity and resistivity of thin tungsten f...

Methods for growing low-resistivity tungsten film

Method of forming low-resistivity tungsten interconnects

Method for reducing tungsten film roughness and improving step cove...

Patents Applicationslast 30 patents

HYBRID SHOWERHEAD WITH SEPARATE FACEPLATE FOR HIGH TEMPERATURE PROCESS

ATOMIC LAYER DEPOSITION WITH MULTIPLE UNIFORMLY HEATED CHARGE VOLUMES

SUBLIMATION CONTROL USING DOWNSTREAM PRESSURE SENSING

AXIALLY COOLED METAL SHOWERHEADS FOR HIGH TEMPERATURE PROCESSES

HEATER DESIGN SOLUTIONS FOR CHEMICAL DELIVERY SYSTEMS

VAPOR ACCUMULATOR FOR CORROSIVE GASES WITH PURGING

APPARATUS FOR PURGING SEMICONDUCTOR PROCESS CHAMBER SLIT VALVE OPENING

VAPOR MANIFOLD WITH INTEGRATED VAPOR CONCENTRATION SENSOR

APPARATUS FOR PURGING SEMICONDUCTOR PROCESS CHAMBER SLIT VALVE OPENING

CORROSION RESISTANT GAS DISTRIBUTION MANIFOLD WITH THERMALLY CONTRO...

GAS INLET VALVE WITH INCOMPATIBLE MATERIALS ISOLATION

AZIMUTHAL MIXER

HYBRID IMPEDANCE MATCHING FOR INDUCTIVELY COUPLED PLASMA SYSTEM

HYBRID IMPEDANCE MATCHING FOR INDUCTIVELY COUPLED PLASMA SYSTEM

METHODS AND APPARATUS FOR CLEANING DEPOSITION CHAMBERS

PEDESTAL WITH EDGE GAS DEFLECTOR FOR EDGE PROFILE CONTROL

METHODS FOR GROWING LOW-RESISTIVITY TUNGSTEN FILM

Methods for growing low-resistivity tungsten film

Reducing silicon attack and improving resistivity of tungsten nitri...

Method for reducing tungsten film roughness and improving step cove...

Method of forming low-resistivity tungsten interconnects