Pao-Hwa Chou

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film-forming method for forming silicon oxide film on tungsten film...
- Patent number 9,466,476
- Issue date Oct 11, 2016
- Tokyo Electron Limited
- Jun Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming method for forming silicon oxide film on tungsten film...
- Patent number 9,460,913
- Issue date Oct 4, 2016
- Tokyo Electron Limited
- Jun Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method and apparatus
- Patent number 8,734,901
- Issue date May 27, 2014
- Tokyo Electron Limited
- Keisuke Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer sidewall spacer for seam protection of a patterned struc...
- Patent number 8,673,725
- Issue date Mar 18, 2014
- Tokyo Electron Limited
- David L. O'Meara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual sidewall spacer for seam protection of a patterned structure
- Patent number 8,664,102
- Issue date Mar 4, 2014
- Tokyo Electron Limited
- David L. O'Meara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film deposition method
- Patent number 8,658,247
- Issue date Feb 25, 2014
- Tokyo Electron Limited
- Toshiyuki Ikeuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film forming method, thin film forming apparatus, and program
- Patent number 8,642,486
- Issue date Feb 4, 2014
- Tokyo Electron Limited
- Toshiyuki Ikeuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiCN film formation method and apparatus
- Patent number 8,591,989
- Issue date Nov 26, 2013
- Tokyo Electron Limited
- Pao-Hwa Chou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical film formation apparatus and method for using same
- Patent number 8,563,096
- Issue date Oct 22, 2013
- Tokyo Electron Limited
- Masanobu Matsunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Micro pattern forming method
- Patent number 8,383,522
- Issue date Feb 26, 2013
- Tokyo Electron Limited
- Shigeru Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Film formation method and apparatus for semiconductor process
- Patent number 8,343,594
- Issue date Jan 1, 2013
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and apparatus
- Patent number 8,216,648
- Issue date Jul 10, 2012
- Tokyo Electron Limited
- Masanobu Matsunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and apparatus for semiconductor process
- Patent number 8,178,448
- Issue date May 15, 2012
- Tokyo Electron Limited
- Nobutake Nodera
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Patterning method
- Patent number 8,168,375
- Issue date May 1, 2012
- Tokyo Electron Limited
- Shigeru Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Film formation method and apparatus for semiconductor process
- Patent number 8,080,290
- Issue date Dec 20, 2011
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and apparatus for forming silicon-containing...
- Patent number 8,034,673
- Issue date Oct 11, 2011
- Tokyo Electron Limited
- Kentaro Kadonaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film formation apparatus for semiconductor process and method for u...
- Patent number 8,025,931
- Issue date Sep 27, 2011
- Tokyo Electron Limited
- Pao-Hwa Chou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Patterning method
- Patent number 7,989,354
- Issue date Aug 2, 2011
- Tokyo Electron Limited
- Shigeru Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Film formation method and apparatus for semiconductor process
- Patent number 7,964,241
- Issue date Jun 21, 2011
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus and method for semiconductor process
- Patent number 7,959,733
- Issue date Jun 14, 2011
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming silicon-containing insulating film
- Patent number 7,758,920
- Issue date Jul 20, 2010
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Patterning method utilizing SiBN and photolithography
- Patent number 7,754,622
- Issue date Jul 13, 2010
- Tokyo Electron Limited
- Pao-Hwa Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 7,718,497
- Issue date May 18, 2010
- Tokyo Electron Limited
- Yasushi Akasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film formation method and apparatus for semiconductor process
- Patent number 7,507,676
- Issue date Mar 24, 2009
- Tokyo Electron Limited
- Pao-Hwa Chou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and apparatus for semiconductor process for f...
- Patent number 7,462,571
- Issue date Dec 9, 2008
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and apparatus for semiconductor process
- Patent number 7,351,668
- Issue date Apr 1, 2008
- Tokyo Electron Limited
- Pao-Hwa Chou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus and method for semiconductor process
- Patent number 7,300,885
- Issue date Nov 27, 2007
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Film Forming Apparatus
- Publication number 20160024654
- Publication date Jan 28, 2016
- TOKYO ELECTRON LIMITED
- Kohei FUKUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD FOR FORMING SILICON OXIDE FILM ON TUNGSTEN FILM...
- Publication number 20150332917
- Publication date Nov 19, 2015
- TOKYO ELECTRON LIMITED
- Jun SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL HEAT TREATMENT APPARATUS, METHOD OF OPERATING VERTICAL HEA...
- Publication number 20150259799
- Publication date Sep 17, 2015
- TOKYO ELECTRON LIMITED
- Yutaka MOTOYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD FOR FORMING SILICON OXIDE FILM ON TUNGSTEN FILM...
- Publication number 20150087161
- Publication date Mar 26, 2015
- TOKYO ELECTRON LIMITED
- Jun SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM-FORMING METHOD FOR FORMING SILICON OXIDE FILM ON TUNGSTEN FILM...
- Publication number 20140199839
- Publication date Jul 17, 2014
- TOKYO ELECTRON LIMITED
- Jun SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM FORMING APPARATUS AND COMPUTER-READABLE MEDIUM
- Publication number 20140090594
- Publication date Apr 3, 2014
- TOKYO ELECTRON LIMITED
- Toshiyuki IKEUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SiCN FILM FORMATION METHOD AND APPARATUS
- Publication number 20120282418
- Publication date Nov 8, 2012
- TOKYO ELECTRON LIMITED
- Pao-Hwa Chou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION METHOD AND APPARATUS
- Publication number 20120269969
- Publication date Oct 25, 2012
- TOKYO ELECTRON LIMITED
- Keisuke SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS
- Publication number 20120190215
- Publication date Jul 26, 2012
- TOKYO ELECTRON LIMITED
- Toshiyuki IKEUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM FORMING METHOD, THIN FILM FORMING APPARATUS, AND PROGRAM
- Publication number 20120164847
- Publication date Jun 28, 2012
- TOKYO ELECTRON LIMITED
- Toshiyuki IKEUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS FOR FORMING SILICON...
- Publication number 20120164327
- Publication date Jun 28, 2012
- TOKYO ELECTRON LIMITED
- Jun SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
- Publication number 20110281443
- Publication date Nov 17, 2011
- TOKYO ELECTRON LIMITED
- Pao-Hwa CHOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL SIDEWALL SPACER FOR SEAM PROTECTION OF A PATTERNED STRUCTURE
- Publication number 20110241085
- Publication date Oct 6, 2011
- TOKYO ELECTRON LIMITED
- David L. O'Meara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTILAYER SIDEWALL SPACER FOR SEAM PROTECTION OF A PATTERNED STRUC...
- Publication number 20110241128
- Publication date Oct 6, 2011
- TOKYO ELECTRON LIMITED
- David L. O'Meara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICRO PATTERN FORMING METHOD
- Publication number 20110237082
- Publication date Sep 29, 2011
- TOKYO ELECTRON LIMITED
- Shigeru Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VERTICAL FILM FORMATION APPARATUS AND METHOD FOR USING SAME
- Publication number 20110129618
- Publication date Jun 2, 2011
- TOKYO ELECTRON LIMITED
- Masanobu MATSUNAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND APPARATUS
- Publication number 20110129619
- Publication date Jun 2, 2011
- TOKYO ELECTRON LIMITED
- Masanobu Matsunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS
- Publication number 20100304574
- Publication date Dec 2, 2010
- TOKYO ELECTRON LIMITED
- Nobutake NODERA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PATTERNING METHOD
- Publication number 20100130015
- Publication date May 27, 2010
- TOKYO ELECTRON LIMITED
- Shigeru Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERNING METHOD
- Publication number 20100112496
- Publication date May 6, 2010
- TOKYO ELECTRON LIMITED
- Shigeru Nakajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERNING METHOD
- Publication number 20100112796
- Publication date May 6, 2010
- TOKYO ELECTRON LIMITED
- Pao-Hwa Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION APPARATUS AND METHOD FOR SEMICONDUCTOR PROCESS
- Publication number 20090275150
- Publication date Nov 5, 2009
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND APPARATUS FOR FORMING SILICON-CONTAINING...
- Publication number 20090263975
- Publication date Oct 22, 2009
- TOKYO ELECTRON LIMITED
- Kentaro KADONAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film formation method and apparatus for semiconductor process
- Publication number 20090191722
- Publication date Jul 30, 2009
- TOKYO ELECTRON LIMITED
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film formation method and apparatus for semiconductor process
- Publication number 20080311760
- Publication date Dec 18, 2008
- Nobutake Nodera
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20080299728
- Publication date Dec 4, 2008
- TOKYO ELECTRON LIMITED
- Yasushi Akasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS
- Publication number 20080274302
- Publication date Nov 6, 2008
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SiCN film formation method and apparatus
- Publication number 20080213479
- Publication date Sep 4, 2008
- TOKYO ELECTRON LIMITED
- Pao-Hwa Chou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film formation method and apparatus for semiconductor process
- Publication number 20080063791
- Publication date Mar 13, 2008
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film formation apparatus for semiconductor process and method for u...
- Publication number 20080014758
- Publication date Jan 17, 2008
- TOKYO ELECTRON LIMITED
- Pao-Hwa Chou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Pao-Hwa Chou

Person

Patents Grantslast 30 patents

Film-forming method for forming silicon oxide film on tungsten film...

Film-forming method for forming silicon oxide film on tungsten film...

Film deposition method and apparatus

Multilayer sidewall spacer for seam protection of a patterned struc...

Dual sidewall spacer for seam protection of a patterned structure

Film deposition method

Thin film forming method, thin film forming apparatus, and program

SiCN film formation method and apparatus

Vertical film formation apparatus and method for using same

Micro pattern forming method

Film formation method and apparatus for semiconductor process

Film formation method and apparatus

Film formation method and apparatus for semiconductor process

Patterning method

Film formation method and apparatus for semiconductor process

Film formation method and apparatus for forming silicon-containing...

Film formation apparatus for semiconductor process and method for u...

Patterning method

Film formation method and apparatus for semiconductor process

Film formation apparatus and method for semiconductor process

Method and apparatus for forming silicon-containing insulating film

Patterning method utilizing SiBN and photolithography

Method for manufacturing semiconductor device

Film formation method and apparatus for semiconductor process

Film formation method and apparatus for semiconductor process for f...

Film formation method and apparatus for semiconductor process

Film formation apparatus and method for semiconductor process

Patents Applicationslast 30 patents

Film Forming Apparatus

FILM-FORMING METHOD FOR FORMING SILICON OXIDE FILM ON TUNGSTEN FILM...

VERTICAL HEAT TREATMENT APPARATUS, METHOD OF OPERATING VERTICAL HEA...

FILM-FORMING METHOD FOR FORMING SILICON OXIDE FILM ON TUNGSTEN FILM...

FILM-FORMING METHOD FOR FORMING SILICON OXIDE FILM ON TUNGSTEN FILM...

THIN FILM FORMING APPARATUS AND COMPUTER-READABLE MEDIUM

SiCN FILM FORMATION METHOD AND APPARATUS

FILM DEPOSITION METHOD AND APPARATUS

FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS

THIN FILM FORMING METHOD, THIN FILM FORMING APPARATUS, AND PROGRAM

FILM-FORMING METHOD AND FILM-FORMING APPARATUS FOR FORMING SILICON...

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

DUAL SIDEWALL SPACER FOR SEAM PROTECTION OF A PATTERNED STRUCTURE

MULTILAYER SIDEWALL SPACER FOR SEAM PROTECTION OF A PATTERNED STRUC...

MICRO PATTERN FORMING METHOD

VERTICAL FILM FORMATION APPARATUS AND METHOD FOR USING SAME

FILM FORMATION METHOD AND APPARATUS

FILM FORMATION METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS

PATTERNING METHOD

PATTERNING METHOD

PATTERNING METHOD

FILM FORMATION APPARATUS AND METHOD FOR SEMICONDUCTOR PROCESS

FILM FORMATION METHOD AND APPARATUS FOR FORMING SILICON-CONTAINING...

Film formation method and apparatus for semiconductor process

Film formation method and apparatus for semiconductor process

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

FILM FORMATION METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS

SiCN film formation method and apparatus

Film formation method and apparatus for semiconductor process

Film formation apparatus for semiconductor process and method for u...