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Parul TYAGI
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Littleton, MA, US
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Patents Grants
last 30 patents
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Patent Grant
Yttrium fluoride films and methods of preparing and using yttrium f...
Patent number
12,031,212
Issue date
Jul 9, 2024
Entegris, Inc.
Carlo Waldfried
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
YTTRIUM FLUORIDE FILMS AND METHODS OF PREPARING AND USING YTTRIUM F...
Publication number
20210317572
Publication date
Oct 14, 2021
Entegris, Inc.
Carlo WALDFRIED
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...