Pascal Marsollek

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for positioning a component of an optical system
- Patent number 11,169,359
- Issue date Nov 9, 2021
- Carl Zeiss SMT GmbH
- Pascal Marsollek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Bearing assembly for a lithography system, and lithography system
- Patent number 10,386,732
- Issue date Aug 20, 2019
- Carl Zeiss SMT GmbH
- Pascal Marsollek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus with near-field manipulator
- Patent number 10,108,094
- Issue date Oct 23, 2018
- Carl Zeiss SMT GmbH
- Peter Deufel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optimum arrangement of actuator and sensor points on an optical ele...
- Patent number 10,025,200
- Issue date Jul 17, 2018
- Carl Zeiss SMT GmbH
- Pascal Marsollek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR POSITIONING A COMPONENT OF AN OPTICAL SYSTEM
- Publication number 20190302402
- Publication date Oct 3, 2019
- Carl Zeiss SMT GMBH
- Pascal Marsollek
- G02 - OPTICS
Information Patent Application
BEARING ASSEMBLY FOR A LITHOGRAPHY SYSTEM, AND LITHOGRAPHY SYSTEM
- Publication number 20190079417
- Publication date Mar 14, 2019
- Carl Zeiss SMT GMBH
- Pascal Marsollek
- G02 - OPTICS
Information Patent Application
OPTIMUM ARRANGEMENT OF ACTUATOR AND SENSOR POINTS ON AN OPTICAL ELE...
- Publication number 20170068165
- Publication date Mar 9, 2017
- Carl Zeiss SMT GMBH
- Pascal Marsollek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS WITH NEAR-FIELD MANIPULATOR
- Publication number 20170052453
- Publication date Feb 23, 2017
- Carl Zeiss SMT GMBH
- Peter Deufel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY