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Patents Applicationslast 30 patents

Information Patent Application
AN ATOMIC LAYER DEPOSITION APPARATUS AND METHOD
- Publication number 20240352582
- Publication date Oct 24, 2024
- BENEQ OY
- Markus BOSUND
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AN ATOMIC LAYER DEPOSITION REACTION CHAMBER AND AN ATOMIC LAYER DEP...
- Publication number 20240344197
- Publication date Oct 17, 2024
- BENEQ OY
- Markus BOSUND
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AN ATOMIC LAYER DEPOSITION APPARATUS AND AN ARRANGEMENT
- Publication number 20240337019
- Publication date Oct 10, 2024
- BENEQ OY
- Olli-Pekka SUHONEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING SURFACE OF A SEMICONDUCTOR SUBS...
- Publication number 20220356561
- Publication date Nov 10, 2022
- BENEQ OY
- Mikko SÖDERLUND
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...