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Patricius Aloysius Jacobus Tinnemans
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Hapert, NL
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last 30 patents
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Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060139600
Publication date
Jun 29, 2006
ASML NETHERLANDS B.V.
Patricius Aloysius Jacobus Tinnemans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Method and device for alignment of a substrate
Publication number
20050140960
Publication date
Jun 30, 2005
ASML NETHERLANDS B.V.
Johannes Martinus Andreas Hazenberg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY