Patrick A. Higashi

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Hacienda Heights, CA, US

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Patents Applicationslast 30 patents

Information Patent Application
EDDY CURRENT MONITORING TO DETECT VIBRATION IN POLISHING
- Publication number 20230286107
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
SLURRY-BASED TEMPERATURE CONTROL FOR CMP
- Publication number 20220281070
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Ekaterina A. Mikhaylichenko
- B24 - GRINDING POLISHING
Information Patent Application
TEMPERATURE CONTROL WITH INTRA-LAYER TRANSITION DURING CMP
- Publication number 20220281061
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Ekaterina A. Mikhaylichenko
- B24 - GRINDING POLISHING