Patrick Chung

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Edge ring assembly for improving feature profile tilting at extreme...
- Patent number 10,854,492
- Issue date Dec 1, 2020
- Lam Research Corporation
- William Frederick Bosch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing bevel protective film
- Patent number 8,501,283
- Issue date Aug 6, 2013
- Lam Research Corporation
- Neungho Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Minimization of mask undercut on deep silicon etch
- Patent number 8,262,920
- Issue date Sep 11, 2012
- Lam Research Corporation
- Tamarak Pandhumsoporn
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COLD EDGE LOW TEMPERATURE ELECTROSTATIC CHUCK
- Publication number 20230395359
- Publication date Dec 7, 2023
- LAM RESEARCH CORPORATION
- Ambarish Chhatre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING ASSEMBLY FOR IMPROVING FEATURE PROFILE TILTING AT EXTREME...
- Publication number 20170053820
- Publication date Feb 23, 2017
- LAM RESEARCH CORPORATION
- William Frederick Bosch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARRANGEMENT FOR DEPOSITING BEVEL PROTECTIVE FILM
- Publication number 20130312913
- Publication date Nov 28, 2013
- Neungho Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MINIMIZATION OF MASK UNDERCUT ON DEEP ETCH
- Publication number 20120298301
- Publication date Nov 29, 2012
- LAM RESEARCH CORPORATION
- Tamarak Pandhumsoporn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DEPOSITING BEVEL PROTECTIVE FILM
- Publication number 20120094502
- Publication date Apr 19, 2012
- Neungho Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Minimization of mask undercut on deep silicon etch
- Publication number 20080308526
- Publication date Dec 18, 2008
- Lam Research Corporation
- Tamarak Pandhumsoporn
- H01 - BASIC ELECTRIC ELEMENTS