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Patrick David Vogelsang
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle detector system comprising a conversion electrode
Patent number
8,952,328
Issue date
Feb 10, 2015
FEI Company
Albertus Aemillius Seyno Sluijterman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical position sensor, a position sensitive detector, a lithograp...
Patent number
8,384,879
Issue date
Feb 26, 2013
ASML Netherlands B.V.
Patrick David Vogelsang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and position sensor
Patent number
7,830,495
Issue date
Nov 9, 2010
ASML Netherlands B.V.
Olaf Hubertus Wilhelmus Van Bruggen
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Charged Particle Detector System Comprising a Conversion Electrode
Publication number
20130056634
Publication date
Mar 7, 2013
FEI Company
Albertus Aemillius Seyno Sluijterman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL POSITION SENSOR, A POSITION SENSITIVE DETECTOR, A LITHOGRAP...
Publication number
20100033697
Publication date
Feb 11, 2010
ASML NETHERLANDS B.V.
Patrick David Vogelsang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and position sensor
Publication number
20090015246
Publication date
Jan 15, 2009
ASML NETHERLANDS B.V.
Olaf Hubertus Wilhelmus Van Bruggen
G01 - MEASURING TESTING