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Veldhoven, AN
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last 30 patents
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Patent Grant
Large field of view protection optical system with aberration corre...
Patent number
7,158,215
Issue date
Jan 2, 2007
ASML Holding N.V.
Robert D. Harned
G02 - OPTICS
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last 30 patents
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Patent Application
Large field of view protection optical system with aberration corre...
Publication number
20040263429
Publication date
Dec 30, 2004
ASML Holding N.V.
Robert D. Harned
G02 - OPTICS