Patrick Franken

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Eschweiler, DE

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Patents Grantslast 30 patents

Information Patent Grant
Device and method for exhaust gas treatment on CVD reactor
- Patent number 10,329,668
- Issue date Jun 25, 2019
- Aixtron SE
- Patrick Franken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DEVICE AND METHOD FOR EXHAUST GAS TREATMENT ON CVD REACTOR
- Publication number 20150292083
- Publication date Oct 15, 2015
- AIXTRON SE
- Patrick Franken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...