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Patrick Johannes Cornelus Hendrik Smulders
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last 30 patents
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Patent Grant
Lithographic apparatus and method in a lithographic process
Patent number
10,095,130
Issue date
Oct 9, 2018
ASML Netherlands B.V.
Johannes Pieter Kroes
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,860,926
Issue date
Oct 14, 2014
ASML Netherlands B.V.
Pieter Renaat Maria Hennus
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Lithographic apparatus, device manufacturing method, seal structure...
Patent number
8,390,778
Issue date
Mar 5, 2013
ASML Netherlands B.V.
Patrick Johannes Cornelus Hendrik Smulders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS AND METHOD IN A LITHOGRAPHIC PROCESS
Publication number
20180113389
Publication date
Apr 26, 2018
ASML NETHERLANDS B.V.
Johannes Pieter KROES
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY