Patrick N. Everett

Person

Concord, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for interference lithography utilizing phase-lock...
- Patent number 6,882,477
- Issue date Apr 19, 2005
- Massachusetts Institute of Technology
- Mark Schattenburg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical gap measuring apparatus and method having two-dimensional g...
- Patent number 6,522,411
- Issue date Feb 18, 2003
- Massachusetts Institute of Technology
- Euclid E. Moon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical interference alignment and gapping apparatus
- Patent number 6,088,103
- Issue date Jul 11, 2000
- Massachusetts Institute of Technology
- Patrick N. Everett
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical alignment apparatus having multiple parallel alignment marks
- Patent number 5,808,742
- Issue date Sep 15, 1998
- Massachusetts Institute of Technology
- Patrick N. Everett
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurements using balanced illumination optical microscopy
- Patent number 5,260,558
- Issue date Nov 9, 1993
- Massachusetts Institute of Technology
- William C. Goltsos
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for the alignment of masks
- Patent number 5,160,959
- Issue date Nov 3, 1992
- Massachusetts Institute of Technology
- Patrick N. Everett
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patrick N. Everett

Person

Patents Grantslast 30 patents

Method and system for interference lithography utilizing phase-lock...

Optical gap measuring apparatus and method having two-dimensional g...

Optical interference alignment and gapping apparatus

Optical alignment apparatus having multiple parallel alignment marks

Measurements using balanced illumination optical microscopy

Device and method for the alignment of masks