Patrick P. Naulleau

Person

Oakland, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Diffractive optical element for extreme ultraviolet wavefront control
- Patent number 7,027,226
- Issue date Apr 11, 2006
- EUV LLC
- Kenneth Alan Goldberg
- G02 - OPTICS
Information Patent Grant
Extended surface parallel coating inspection method
- Patent number 7,016,030
- Issue date Mar 21, 2006
- EUV LLC
- Patrick P. Naulleau
- G01 - MEASURING TESTING
Information Patent Grant
Holographic illuminator for synchrotron-based projection lithograph...
- Patent number 6,927,887
- Issue date Aug 9, 2005
- EUV LLC
- Patrick P. Naulleau
- G02 - OPTICS
Information Patent Grant
Method of fabricating reflection-mode EUV diffusers
- Patent number 6,861,273
- Issue date Mar 1, 2005
- EUV LLC
- Erik Anderson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for generating partially coherent radiation
- Patent number 6,859,263
- Issue date Feb 22, 2005
- EUV LLC
- Patrick P. Naulleau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for generating partially coherent radiation
- Patent number 6,798,494
- Issue date Sep 28, 2004
- EUV LLC
- Patrick P. Naulleau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Synchrotron-based EUV lithography illuminator simulator
- Patent number 6,768,567
- Issue date Jul 27, 2004
- EUV LLC
- Patrick P. Naulleau
- G02 - OPTICS
Information Patent Grant
Dual-domain lateral shearing interferometer
- Patent number 6,707,560
- Issue date Mar 16, 2004
- The Regents of the University of California
- Patrick P. Naulleau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Hybrid shearing and phase-shifting point diffraction interferometer
- Patent number 6,573,997
- Issue date Jun 3, 2003
- The Regents of California
- Kenneth Alan Goldberg
- G01 - MEASURING TESTING
Information Patent Grant
System for interferometric distortion measurements that define an o...
- Patent number 6,559,952
- Issue date May 6, 2003
- The Regents of the University of California
- Jeffrey Bokor
- G01 - MEASURING TESTING
Information Patent Grant
Method of fabricating reflection-mode EUV diffraction elements
- Patent number 6,392,792
- Issue date May 21, 2002
- The Regents of the University of California
- Patrick P. Naulleau
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Miniature self-contained vacuum compatible electronic imaging micro...
- Patent number 6,327,102
- Issue date Dec 4, 2001
- The Regents of the University of California
- Patrick P. Naulleau
- G02 - OPTICS
Information Patent Grant
Phase-shifting point diffraction interferometer phase grating designs
- Patent number 6,266,147
- Issue date Jul 24, 2001
- The Regents of the University of California
- Patrick Naulleau
- G01 - MEASURING TESTING
Information Patent Grant
Interferometric at-wavelength flare characterization of EUV optical...
- Patent number 6,233,056
- Issue date May 15, 2001
- The Regents of the University of California
- Patrick P. Naulleau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase-shifting point diffraction interferometer grating designs
- Patent number 6,195,169
- Issue date Feb 27, 2001
- The Regents of the University of California
- Patrick Naulleau
- G02 - OPTICS
Information Patent Grant
Phase-shifting point diffraction interferometer focus-aid enhanced...
- Patent number 6,151,115
- Issue date Nov 21, 2000
- Patrick Naulleau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
In Situ alignment system for phase-shifting point-diffraction inter...
- Patent number 6,118,535
- Issue date Sep 12, 2000
- Kenneth Alan Goldberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Null test fourier domain alignment technique for phase-shifting poi...
- Patent number 6,111,646
- Issue date Aug 29, 2000
- Patrick Naulleau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dual-domain point diffraction interferometer
- Patent number 6,100,978
- Issue date Aug 8, 2000
- Patrick P. Naulleau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Extended surface parallel coating inspection method
- Publication number 20050083515
- Publication date Apr 21, 2005
- The Regents of the University of California
- Patrick P. Naulleau
- G02 - OPTICS
Information Patent Application
Synchrotron-based EUV lithography illuminator simulator
- Publication number 20030227657
- Publication date Dec 11, 2003
- Patrick P. Naulleau
- G02 - OPTICS
Information Patent Application
Apparatus for generating partially coherent radiation
- Publication number 20030174303
- Publication date Sep 18, 2003
- Patrick P. Naulleau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Diffractive optical element for extreme ultraviolet wavefront control
- Publication number 20030081316
- Publication date May 1, 2003
- Kenneth Alan Goldberg
- G02 - OPTICS
Information Patent Application
Holographic illuminator for synchrotron-based projection lithograph...
- Publication number 20030072046
- Publication date Apr 17, 2003
- Patrick P. Naulleau
- G02 - OPTICS
Information Patent Application
Apparatus for generating partially coherent radiation
- Publication number 20030043359
- Publication date Mar 6, 2003
- Patrick P. Naulleau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of fabricating reflection-mode EUV diffusers
- Publication number 20020160545
- Publication date Oct 31, 2002
- Erik Anderson
- H01 - BASIC ELECTRIC ELEMENTS

Patrick P. Naulleau

Person

Patents Grantslast 30 patents

Diffractive optical element for extreme ultraviolet wavefront control

Extended surface parallel coating inspection method

Holographic illuminator for synchrotron-based projection lithograph...

Method of fabricating reflection-mode EUV diffusers

Apparatus for generating partially coherent radiation

Apparatus for generating partially coherent radiation

Synchrotron-based EUV lithography illuminator simulator

Dual-domain lateral shearing interferometer

Hybrid shearing and phase-shifting point diffraction interferometer

System for interferometric distortion measurements that define an o...

Method of fabricating reflection-mode EUV diffraction elements

Miniature self-contained vacuum compatible electronic imaging micro...

Phase-shifting point diffraction interferometer phase grating designs

Interferometric at-wavelength flare characterization of EUV optical...

Phase-shifting point diffraction interferometer grating designs

Phase-shifting point diffraction interferometer focus-aid enhanced...

In Situ alignment system for phase-shifting point-diffraction inter...

Null test fourier domain alignment technique for phase-shifting poi...

Dual-domain point diffraction interferometer

Patents Applicationslast 30 patents

Extended surface parallel coating inspection method

Synchrotron-based EUV lithography illuminator simulator

Apparatus for generating partially coherent radiation

Diffractive optical element for extreme ultraviolet wavefront control

Holographic illuminator for synchrotron-based projection lithograph...

Apparatus for generating partially coherent radiation

Method of fabricating reflection-mode EUV diffusers