Patrick Scheible

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Projection system with compensation of intensity variations and com...
- Patent number 8,605,257
- Issue date Dec 10, 2013
- Carl Zeiss SMT GmbH
- Patrick Scheible
- G02 - OPTICS
Information Patent Grant
Monocrystalline optical component with curved surface and multilaye...
- Patent number 7,489,441
- Issue date Feb 10, 2009
- Carl Zeiss SMT AG
- Harald Schink
- G02 - OPTICS
Information Patent Grant
Projection objective for immersion lithography
- Patent number 7,460,206
- Issue date Dec 2, 2008
- Carl Zeiss SMT AG
- Karl-Stefan Weissenrieder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical component and coating system for coating substrates for opt...
- Patent number 7,093,937
- Issue date Aug 22, 2006
- Carl Zeiss SMT AG
- Harry Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and coating system for coating substrates for optical compon...
- Patent number 6,863,398
- Issue date Mar 8, 2005
- Carl Zeiss SMT AG
- Harry Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY
- Publication number 20080297745
- Publication date Dec 4, 2008
- Carl Zeiss SMT AG
- Karl-Stefan WEISSENRIEDER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY
- Publication number 20080291419
- Publication date Nov 27, 2008
- Carl Zeiss SMT AG
- Karl-Stefan Weissenrieder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection System with Compensation of Intensity Variations and Com...
- Publication number 20080094599
- Publication date Apr 24, 2008
- Carl Zeiss SMT AG
- Patrick Scheible
- G02 - OPTICS
Information Patent Application
Optical component with a curved surface and a multilayer coating
- Publication number 20050286827
- Publication date Dec 29, 2005
- Carl Zeiss SMT AG
- Patrick Scheible
- G02 - OPTICS
Information Patent Application
Projection objective for immersion lithography
- Publication number 20050225737
- Publication date Oct 13, 2005
- Carl Zeiss SMT AG
- Karl-Stefan Weissenrieder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical component and coating system for coating substrates for opt...
- Publication number 20050146683
- Publication date Jul 7, 2005
- Carl Zeiss SMT AG
- Harry Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and coating system for coating substrates for optical compon...
- Publication number 20030082298
- Publication date May 1, 2003
- CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
- Harry Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patrick Scheible

Person

Patents Grantslast 30 patents

Projection system with compensation of intensity variations and com...

Monocrystalline optical component with curved surface and multilaye...

Projection objective for immersion lithography

Optical component and coating system for coating substrates for opt...

Method and coating system for coating substrates for optical compon...

Patents Applicationslast 30 patents

PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY

PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY

Projection System with Compensation of Intensity Variations and Com...

Optical component with a curved surface and a multilayer coating

Projection objective for immersion lithography

Optical component and coating system for coating substrates for opt...

Method and coating system for coating substrates for optical compon...