Patrick Schmid

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Dormstadt, DE

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for the heat treatment of disc shaped substrates
- Patent number 9,111,970
- Issue date Aug 18, 2015
- Waltraud Dietl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for thermally processing a plurality of wafer-sha...
- Patent number 7,977,258
- Issue date Jul 12, 2011
- Mattson Technology, Inc.
- Zsolt Nenyei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for the thermal treatment of disk-shaped substrates
- Patent number 7,704,898
- Issue date Apr 27, 2010
- Mattson Technology, Inc.
- Zsolt Nenyei
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Device for thermal treatment of substrates
- Patent number 6,953,338
- Issue date Oct 11, 2005
- Steag RTP Systems GmbH
- Uwe Kreiser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus device for the heat treatment of substrates
- Patent number 6,752,625
- Issue date Jun 22, 2004
- Steag RTP Systems GmbH
- Helmut Aschner
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR THE HEAT TREATMENT OF DISC SHAPED SUBSTRATES
- Publication number 20090217875
- Publication date Sep 3, 2009
- Mattson Thermal Products GmbH
- Waltraud Dietl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for the Thermal Treatment of Disk-Shaped Substrates
- Publication number 20080311761
- Publication date Dec 18, 2008
- Zsolt Nenyei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for thermally processing a plurality of wafer-sha...
- Publication number 20080248657
- Publication date Oct 9, 2008
- Zsolt Nenyei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device and method for the reduction of particles in the thermal tre...
- Publication number 20070098904
- Publication date May 3, 2007
- Helmut Aschner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device for thermal treatment of substrates
- Publication number 20040029065
- Publication date Feb 12, 2004
- Uwe Kreiser
- H01 - BASIC ELECTRIC ELEMENTS