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Patrick T. Heres
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Boxford, MA, US
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last 30 patents
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Patent Grant
Ion source with tailored extraction shape
Patent number
10,714,296
Issue date
Jul 14, 2020
Axcelis Technologies, Inc.
Patrick T. Heres
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Blended energy ion implantation
Publication number
20230038392
Publication date
Feb 9, 2023
Axcelis Technologies, Inc.
James S. DeLuca
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
ION SOURCE WITH TAILORED EXTRACTION APERTURE SHAPE
Publication number
20200194219
Publication date
Jun 18, 2020
Axcelis Technologies Inc.
Patrick T. Heres
H01 - BASIC ELECTRIC ELEMENTS