Patrick Van Cleemput

Person

Stockton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Line bending control for memory applications
- Patent number 12,274,047
- Issue date Apr 8, 2025
- Lam Research Corporation
- Gorun Butail
Information Patent Grant
Metal deposition
- Patent number 12,203,168
- Issue date Jan 21, 2025
- Lam Research Corporation
- Ravi Vellanki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of tungsten on molybdenum templates
- Patent number 12,148,623
- Issue date Nov 19, 2024
- Lam Research Corporation
- Patrick A. van Cleemput
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to create air gaps
- Patent number 12,112,980
- Issue date Oct 8, 2024
- Lam Research Corporation
- Patrick A. Van Cleemput
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Molybdenum deposition
- Patent number 12,074,029
- Issue date Aug 27, 2024
- Lam Research Corporation
- Patrick A. Van Cleemput
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tin oxide thin film spacers in semiconductor device manufacturing
- Patent number 12,051,589
- Issue date Jul 30, 2024
- Lam Research Corporation
- David Charles Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer deposition of metal films
- Patent number 11,970,776
- Issue date Apr 30, 2024
- Lam Research Corporation
- Joshua Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition tool and method for depositing metal oxide films on orga...
- Patent number 11,887,846
- Issue date Jan 30, 2024
- Lam Research Corporation
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Line bending control for memory applications
- Patent number 11,864,372
- Issue date Jan 2, 2024
- Lam Research Corporation
- Gorun Butail
Information Patent Grant
Systems and methods for homogenous intermixing of precursors in all...
- Patent number 11,827,976
- Issue date Nov 28, 2023
- Lam Research Corporation
- Ilanit Fisher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tin oxide thin film spacers in semiconductor device manufacturing
- Patent number 11,784,047
- Issue date Oct 10, 2023
- Lam Research Corporation
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal-containing passivation for high aspect ratio etch
- Patent number 11,670,516
- Issue date Jun 6, 2023
- Lam Research Corporation
- Karthik S. Colinjivadi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to create air gaps
- Patent number 11,637,037
- Issue date Apr 25, 2023
- Lam Research Corporation
- Patrick van Cleemput
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for UV flowable dielectric
- Patent number 11,270,896
- Issue date Mar 8, 2022
- Lam Research Corporation
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tin oxide thin film spacers in semiconductor device manufacturing
- Patent number 11,183,383
- Issue date Nov 23, 2021
- Lam Research Corporation
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to create air gaps
- Patent number 11,088,019
- Issue date Aug 10, 2021
- Lam Research Corporation
- Patrick A. Van Cleemput
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tin oxide thin film spacers in semiconductor device manufacturing
- Patent number 11,031,245
- Issue date Jun 8, 2021
- Lan Research Corporation
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for deposition and etch in gap fill
- Patent number 10,957,514
- Issue date Mar 23, 2021
- Lam Research Corporation
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for controlling plasma glow discharge in a plasma chamber
- Patent number 10,777,386
- Issue date Sep 15, 2020
- Lam Research Corporation
- Aaron Bingham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low resistivity films containing molybdenum
- Patent number 10,777,453
- Issue date Sep 15, 2020
- Lam Research Corporation
- Shruti Vivek Thombare
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective deposition of SiN on horizontal surfaces
- Patent number 10,615,169
- Issue date Apr 7, 2020
- Lam Research Corporation
- Bart J. van Schravendijk
- G11 - INFORMATION STORAGE
Information Patent Grant
Low resistivity films containing molybdenum
- Patent number 10,510,590
- Issue date Dec 17, 2019
- Lam Research Corporation
- Shruti Vivek Thombare
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for UV flowable dielectric
- Patent number 10,388,546
- Issue date Aug 20, 2019
- Lam Research Corporation
- Jonathan D. Mohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for deposition and etch in gap fill
- Patent number 10,373,806
- Issue date Aug 6, 2019
- Lam Research Corporation
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interlevel conductor pre-fill utilizing selective barrier deposition
- Patent number 10,262,943
- Issue date Apr 16, 2019
- Lam Research Corporation
- Artur Kolics
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Additive for ALD deposition profile tuning in gap features
- Patent number 10,246,774
- Issue date Apr 2, 2019
- Lam Research Corporation
- Patrick Van Cleemput
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated direct dielectric and metal deposition
- Patent number 10,128,116
- Issue date Nov 13, 2018
- Lam Research Corporation
- William T. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for selectively sealing ultra low-k porous dielectric layer...
- Patent number 10,049,921
- Issue date Aug 14, 2018
- Lam Research Corporation
- Nerissa Sue Draeger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low k dielectric deposition via UV driven photopolymerization
- Patent number 9,916,977
- Issue date Mar 13, 2018
- Lam Research Corporation
- Patrick A. Van Cleemput
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interlevel conductor pre-fill utilizing selective barrier deposition
- Patent number 9,875,968
- Issue date Jan 23, 2018
- Lam Research Corporation
- Artur Kolics
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METAL DEPOSITION
- Publication number 20250115998
- Publication date Apr 10, 2025
- LAM RESEARCH CORPORATION
- Ravi Vellanki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOLYBDENUM DEPOSITION
- Publication number 20250029840
- Publication date Jan 23, 2025
- LAM RESEARCH CORPORATION
- Patrick A. VAN CLEEMPUT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GRADIENT LINER IN METAL FILL
- Publication number 20250022751
- Publication date Jan 16, 2025
- LAM RESEARCH CORPORATION
- Sang-Hyeob LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO CREATE AIR GAPS
- Publication number 20240429091
- Publication date Dec 26, 2024
- LAM RESEARCH CORPORATION
- Patrick A. Van Cleemput
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION OF PURE METAL FILMS
- Publication number 20240401196
- Publication date Dec 5, 2024
- LAM RESEARCH CORPORATION
- Shruti Vivek Thombare
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW RESISTIVITY FILMS CONTAINING MOLYBDENUM
- Publication number 20240297075
- Publication date Sep 5, 2024
- LAM RESEARCH CORPORATION
- Shruti Vivek THOMBARE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF METAL FILMS
- Publication number 20240271281
- Publication date Aug 15, 2024
- LAM RESEARCH CORPORATION
- Joshua COLLINS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NON-METAL INCORPORATION IN MOLYBDENUM ON DIELECTRIC SURFACES
- Publication number 20240234152
- Publication date Jul 11, 2024
- LAM RESEARCH CORPORATION
- Lawrence Schloss
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LINE BENDING CONTROL FOR MEMORY APPLICATIONS
- Publication number 20240172413
- Publication date May 23, 2024
- LAM RESEARCH CORPORATION
- Gorun BUTAIL
Information Patent Application
NON-METAL INCORPORATION IN MOLYBDENUM ON DIELECTRIC SURFACES
- Publication number 20240136192
- Publication date Apr 25, 2024
- LAM RESEARCH CORPORATION
- Lawrence Schloss
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR HOMOGENOUS INTERMIXING OF PRECURSORS IN ALL...
- Publication number 20240084443
- Publication date Mar 14, 2024
- LAM RESEARCH CORPORATION
- Ilanit FISHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING
- Publication number 20240030031
- Publication date Jan 25, 2024
- LAM RESEARCH CORPORATION
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELF-LIMITING GROWTH
- Publication number 20230290680
- Publication date Sep 14, 2023
- LAM RESEARCH CORPORATION
- Joshua Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL OXIDE DIFFUSION BARRIERS
- Publication number 20230260834
- Publication date Aug 17, 2023
- LAM RESEARCH CORPORATION
- Lee J. BROGAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF PURE METAL FILMS
- Publication number 20220389579
- Publication date Dec 8, 2022
- LAM RESEARCH CORPORATION
- Shruti Vivek Thombare
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOLYBDENUM FILL
- Publication number 20220375792
- Publication date Nov 24, 2022
- LAM RESEARCH CORPORATION
- Lawrence SCHLOSS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF METAL FILMS
- Publication number 20220356579
- Publication date Nov 10, 2022
- LAM RESEARCH CORPORATION
- Joshua Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOLYBDENUM TEMPLATES FOR TUNGSTEN
- Publication number 20220359211
- Publication date Nov 10, 2022
- LAM RESEARCH CORPORATION
- Patrick A. VAN CLEEMPUT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOLYBDENUM DEPOSITION
- Publication number 20220328317
- Publication date Oct 13, 2022
- LAM RESEARCH CORPORATION
- Jeong-Seok NA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL DEPOSITION
- Publication number 20220290300
- Publication date Sep 15, 2022
- LAM RESEARCH CORPORATION
- Ravi Vellanki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW RESISTIVITY FILMS CONTAINING MOLYBDENUM
- Publication number 20220223471
- Publication date Jul 14, 2022
- LAM RESEARCH CORPORATION
- Shruti Vivek THOMBARE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF METAL FILMS
- Publication number 20220195598
- Publication date Jun 23, 2022
- LAM RESEARCH CORPORATION
- Joshua Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LINE BENDING CONTROL FOR MEMORY APPLICATIONS
- Publication number 20220028864
- Publication date Jan 27, 2022
- LAM RESEARCH CORPORATION
- Gorun BUTAIL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOLYBDENUM TEMPLATES FOR TUNGSTEN
- Publication number 20220013365
- Publication date Jan 13, 2022
- LAM RESEARCH CORPORATION
- Patrick A. van Cleemput
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING
- Publication number 20220005694
- Publication date Jan 6, 2022
- LAM RESEARCH CORPORATION
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD TO CREATE AIR GAPS
- Publication number 20210343579
- Publication date Nov 4, 2021
- LAM RESEARCH CORPORATION
- Patrick A. Van Cleemput
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING
- Publication number 20210242019
- Publication date Aug 5, 2021
- LAM RESEARCH CORPORATION
- David Charles Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL-CONTAINING PASSIVATION FOR HIGH ASPECT RATIO ETCH
- Publication number 20210242032
- Publication date Aug 5, 2021
- LAM RESEARCH CORPORATION
- Karthik S. COLINJIVADI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION OF PURE METAL FILMS
- Publication number 20210140043
- Publication date May 13, 2021
- LAM RESEARCH CORPORATION
- Shruti Vivek Thombare
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR HOMOGENOUS INTERMIXING OF PRECURSORS IN ALL...
- Publication number 20200407842
- Publication date Dec 31, 2020
- LAM RESEARCH CORPORATION
- Ilanit FISHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patrick Van Cleemput

Person

Patents Grantslast 30 patents

Line bending control for memory applications

Metal deposition

Deposition of tungsten on molybdenum templates

Method to create air gaps

Molybdenum deposition

Tin oxide thin film spacers in semiconductor device manufacturing

Atomic layer deposition of metal films

Deposition tool and method for depositing metal oxide films on orga...

Line bending control for memory applications

Systems and methods for homogenous intermixing of precursors in all...

Tin oxide thin film spacers in semiconductor device manufacturing

Metal-containing passivation for high aspect ratio etch

Method to create air gaps

Apparatus for UV flowable dielectric

Tin oxide thin film spacers in semiconductor device manufacturing

Method to create air gaps

Tin oxide thin film spacers in semiconductor device manufacturing

Apparatus and method for deposition and etch in gap fill

Methods for controlling plasma glow discharge in a plasma chamber

Low resistivity films containing molybdenum

Selective deposition of SiN on horizontal surfaces

Low resistivity films containing molybdenum

Apparatus for UV flowable dielectric

Apparatus and method for deposition and etch in gap fill

Interlevel conductor pre-fill utilizing selective barrier deposition

Additive for ALD deposition profile tuning in gap features

Integrated direct dielectric and metal deposition

Method for selectively sealing ultra low-k porous dielectric layer...

Low k dielectric deposition via UV driven photopolymerization

Interlevel conductor pre-fill utilizing selective barrier deposition

Patents Applicationslast 30 patents

METAL DEPOSITION

MOLYBDENUM DEPOSITION

GRADIENT LINER IN METAL FILL

METHOD TO CREATE AIR GAPS

DEPOSITION OF PURE METAL FILMS

LOW RESISTIVITY FILMS CONTAINING MOLYBDENUM

DEPOSITION OF METAL FILMS

NON-METAL INCORPORATION IN MOLYBDENUM ON DIELECTRIC SURFACES

LINE BENDING CONTROL FOR MEMORY APPLICATIONS

NON-METAL INCORPORATION IN MOLYBDENUM ON DIELECTRIC SURFACES

SYSTEMS AND METHODS FOR HOMOGENOUS INTERMIXING OF PRECURSORS IN ALL...

TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING

SELF-LIMITING GROWTH

METAL OXIDE DIFFUSION BARRIERS

DEPOSITION OF PURE METAL FILMS

MOLYBDENUM FILL

DEPOSITION OF METAL FILMS

MOLYBDENUM TEMPLATES FOR TUNGSTEN

MOLYBDENUM DEPOSITION

METAL DEPOSITION

LOW RESISTIVITY FILMS CONTAINING MOLYBDENUM

DEPOSITION OF METAL FILMS

LINE BENDING CONTROL FOR MEMORY APPLICATIONS

MOLYBDENUM TEMPLATES FOR TUNGSTEN

TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING

METHOD TO CREATE AIR GAPS

TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING

METAL-CONTAINING PASSIVATION FOR HIGH ASPECT RATIO ETCH

DEPOSITION OF PURE METAL FILMS

SYSTEMS AND METHODS FOR HOMOGENOUS INTERMIXING OF PRECURSORS IN ALL...