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Deurne, BE
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Patents Grants
last 30 patents
Information
Patent Grant
Method of preparing a substrate for lithography, a substrate, a dev...
Patent number
8,394,572
Issue date
Mar 12, 2013
ASML Netherlands B.V.
Marcus Theodoor Wilhelmus Van Der Heijden
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of preparing a substrate for lithography, a substrate, a dev...
Patent number
8,114,568
Issue date
Feb 14, 2012
AMSL Netherlands B.V.
Marcus Theodoor Wilhelmus Van Der Heijden
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic method and device manufactured thereby
Patent number
7,745,095
Issue date
Jun 29, 2010
ASML Netherlands B.V.
Patrick Wong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method and substrate
Patent number
7,307,687
Issue date
Dec 11, 2007
ASML Netherlands B.V.
Johannes Anna Quaedackers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF PREPARING A SUBSTRATE FOR LITHOGRAPHY, A SUBSTRATE, A DEV...
Publication number
20120129098
Publication date
May 24, 2012
ASML NETHERLANDS B.V.
Marcus Theodoor Wilhelmus VAN DER HEIJDEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of preparing a substrate for lithography, a substrate, a dev...
Publication number
20090201485
Publication date
Aug 13, 2009
ASML NETHERLANDS B.V.
Marcus Theodoor Wilhelmus Van Der Heijden
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic method and device manufactured thereby
Publication number
20090011369
Publication date
Jan 8, 2009
ASML NETHERLANDS B.V.
Patrick Wong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic device manufacturing method, lithographic cell, and co...
Publication number
20080160458
Publication date
Jul 3, 2008
ASML NETHERLANDS B.V.
Koen Van Ingen Schenau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method and substrate
Publication number
20070216883
Publication date
Sep 20, 2007
ASML NETHERLANDS B.V.
Johannes Anna Quaedackers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY