Paul A. Zimmerman

Person

Phoenix, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Low-defect graphene-based devices and interconnects
- Patent number 10,998,405
- Issue date May 4, 2021
- Intel Corporation
- Paul A. Zimmerman
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Precursor and process design for photo-assisted metal atomic layer...
- Patent number 9,932,671
- Issue date Apr 3, 2018
- Intel Corporation
- James M. Blackwell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process and material for preventing deleterious expansion of high a...
- Patent number 9,786,559
- Issue date Oct 10, 2017
- Intel Corporation
- Paul A. Zimmerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning organic residues from EUV optics and masks
- Patent number 8,764,905
- Issue date Jul 1, 2014
- Intel Corporation
- Paul A. Zimmerman
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Mounting a pellicle to a frame
- Patent number 8,551,675
- Issue date Oct 8, 2013
- Intel Corporation
- Florence Eschbach
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Use of F-based gate etch to passivate the high-k/metal gate stack f...
- Patent number 8,319,295
- Issue date Nov 27, 2012
- IMEC
- Nadine Collaert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating a high-K dielectric layer
- Patent number 8,211,812
- Issue date Jul 3, 2012
- IMEC
- Lars-Ake Ragnarsson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Immersion lithography using hafnium-based nanoparticles
- Patent number 8,134,684
- Issue date Mar 13, 2012
- Sematech, Inc.
- Paul A. Zimmerman
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Non-aggregating nanoparticles and the use thereof
- Patent number 8,124,230
- Issue date Feb 28, 2012
- Intel Corporation
- Paul A. Zimmerman
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Mounting a pellicle to a frame
- Patent number 8,012,651
- Issue date Sep 6, 2011
- Intel Corporation
- Florence Eschbach
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for making soft pellicles
- Patent number 7,732,120
- Issue date Jun 8, 2010
- Sematech Inc.
- Paul A. Zimmerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Soft pellicle and method of making same
- Patent number 7,709,180
- Issue date May 4, 2010
- Sematech, Inc.
- Paul A. Zimmerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Soft pellicle for 157 and 193 nm and method of making same
- Patent number 7,504,192
- Issue date Mar 17, 2009
- Sematech Inc.
- Paul A. Zimmerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mounting a pellicle to a frame
- Patent number 7,316,869
- Issue date Jan 8, 2008
- Intel Corporation
- Florence Eschbach
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Attaching a pellicle frame to a reticle
- Patent number 7,264,853
- Issue date Sep 4, 2007
- Intel Corporation
- Florence Eschbach
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
LOW-DEFECT GRAPHENE-BASED DEVICES & INTERCONNECTS
- Publication number 20180350914
- Publication date Dec 6, 2018
- Intel Corporation
- Paul A. ZIMMERMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Precursor and Process Design for Photo-Assisted Metal Atomic Layer...
- Publication number 20170058401
- Publication date Mar 2, 2017
- Intel Corporation
- James M. BLACKWELL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS AND MATERIAL FOR PREVENTING DELETERIOUS EXPANSION OF HIGH A...
- Publication number 20160163596
- Publication date Jun 9, 2016
- Intel Corporation
- Paul A. Zimmerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT EMITTING DIODES WITH IMPROVED EFFICIENCY
- Publication number 20150380615
- Publication date Dec 31, 2015
- Paul A. Zimmerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS AND MATERIAL FOR PREVENTING DELETERIOUS EXPANSION OF HIGH A...
- Publication number 20140117559
- Publication date May 1, 2014
- Paul A. Zimmerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Synthesis of Graphene Films Cycloalkanes
- Publication number 20120132516
- Publication date May 31, 2012
- Paul A. Zimmerman
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
MOUNTING A PELLICLE TO A FRAME
- Publication number 20110294048
- Publication date Dec 1, 2011
- Intel Corporation
- Florence Eschbach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Non-aggregating nanoparticles and the use thereof
- Publication number 20110039105
- Publication date Feb 17, 2011
- Paul A. Zimmerman
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMMERSION LITHOGRAPHY USING HAFNIUM-BASED NANOPARTICLES
- Publication number 20090213346
- Publication date Aug 27, 2009
- Paul A. Zimmerman
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR MAKING SOFT PELLICLES
- Publication number 20090110895
- Publication date Apr 30, 2009
- Paul A. Zimmerman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SOFT PELLICLE AND METHOD OF MAKING SAME
- Publication number 20090081567
- Publication date Mar 26, 2009
- SEMATECH, Inc.
- Paul A. Zimmerman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR FABRICATING A HIGH-K DIELECTRIC LAYER
- Publication number 20080265380
- Publication date Oct 30, 2008
- Interuniversitair Microelektronica Centrum vzw (IMEC)
- Lars-Ake Ragnarsson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
USE OF F-BASED GATE ETCH TO PASSIVATE THE HIGH-K/METAL GATE STACK F...
- Publication number 20080164539
- Publication date Jul 10, 2008
- Interuniversitair Microelektronica Centrum (IMEC)
- Nadine Collaert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Mounting a Pellicle to a Frame
- Publication number 20080094591
- Publication date Apr 24, 2008
- Intel Corporation
- Florence Eschbach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Atomic layer deposition method for depositing a layer
- Publication number 20070049045
- Publication date Mar 1, 2007
- Paul Zimmerman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Soft pellicle for 157 and 193 nm and method of making same
- Publication number 20050214655
- Publication date Sep 29, 2005
- SEMATECH, Inc.
- Paul A. Zimmerman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mounting a pellicle to a frame
- Publication number 20050048376
- Publication date Mar 3, 2005
- Intel Corporation
- Florence Eschbach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Attaching a pellicle frame to a reticle
- Publication number 20050045262
- Publication date Mar 3, 2005
- Intel Corporation
- Florence Eschbach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Paul A. Zimmerman

Person

Patents Grantslast 30 patents

Low-defect graphene-based devices and interconnects

Precursor and process design for photo-assisted metal atomic layer...

Process and material for preventing deleterious expansion of high a...

Cleaning organic residues from EUV optics and masks

Mounting a pellicle to a frame

Use of F-based gate etch to passivate the high-k/metal gate stack f...

Method for fabricating a high-K dielectric layer

Immersion lithography using hafnium-based nanoparticles

Non-aggregating nanoparticles and the use thereof

Mounting a pellicle to a frame

Method for making soft pellicles

Soft pellicle and method of making same

Soft pellicle for 157 and 193 nm and method of making same

Mounting a pellicle to a frame

Attaching a pellicle frame to a reticle

Patents Applicationslast 30 patents

LOW-DEFECT GRAPHENE-BASED DEVICES & INTERCONNECTS

Precursor and Process Design for Photo-Assisted Metal Atomic Layer...

PROCESS AND MATERIAL FOR PREVENTING DELETERIOUS EXPANSION OF HIGH A...

LIGHT EMITTING DIODES WITH IMPROVED EFFICIENCY

PROCESS AND MATERIAL FOR PREVENTING DELETERIOUS EXPANSION OF HIGH A...

Synthesis of Graphene Films Cycloalkanes

MOUNTING A PELLICLE TO A FRAME

Non-aggregating nanoparticles and the use thereof

IMMERSION LITHOGRAPHY USING HAFNIUM-BASED NANOPARTICLES

METHOD FOR MAKING SOFT PELLICLES

SOFT PELLICLE AND METHOD OF MAKING SAME

METHOD FOR FABRICATING A HIGH-K DIELECTRIC LAYER

USE OF F-BASED GATE ETCH TO PASSIVATE THE HIGH-K/METAL GATE STACK F...

Mounting a Pellicle to a Frame

Atomic layer deposition method for depositing a layer

Soft pellicle for 157 and 193 nm and method of making same

Mounting a pellicle to a frame

Attaching a pellicle frame to a reticle