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Paul Alexander McKenzie
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Encinitas, CA, US
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last 30 patents
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Patent Grant
Final focus assembly for extreme ultraviolet light source
Patent number
9,374,882
Issue date
Jun 21, 2016
ASML Netherlands B.V.
Paul A. McKenzie
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Calibration of photoelectromagnetic sensor in a laser source
Patent number
9,239,268
Issue date
Jan 19, 2016
ASML Netherlands B.V.
Rong Liu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Calibration of photoelectromagnetic sensor in a laser source
Patent number
9,239,269
Issue date
Jan 19, 2016
ASML Netherlands B.V.
Rong Liu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
CALIBRATION OF PHOTOELECTROMAGNETIC SENSOR IN A LASER SOURCE
Publication number
20160011056
Publication date
Jan 14, 2016
ASML NETHERLANDS B.V.
Rong Liu
G01 - MEASURING TESTING
Information
Patent Application
CALIBRATION OF PHOTOELECTROMAGNETIC SENSOR IN A LASER SOURCE
Publication number
20160011057
Publication date
Jan 14, 2016
ASML NETHERLANDS B.V.
Rong Liu
G01 - MEASURING TESTING
Information
Patent Application
FINAL FOCUS ASSEMBLY FOR EXTREME ULTRAVIOLET LIGHT SOURCE
Publication number
20150173164
Publication date
Jun 18, 2015
ASML NETHERLANDS B.V.
Paul A. McKenzie
G02 - OPTICS