Paul Allan Daniel

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Kittery Point, ME, US

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Patents Grantslast 30 patents

Information Patent Grant
Ion implantation systems and methods utilizing a downstream gas source
- Patent number 6,891,173
- Issue date May 10, 2005
- Varian Semiconductor Equipment Associates, Inc.
- George Gammel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for determining beam parallelism and direction
- Patent number 6,791,094
- Issue date Sep 14, 2004
- Varian Semiconductor Equipment Associates, Inc.
- Joseph C. Olson
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Ion implantation systems and methods utilizing a downstream gas source
- Publication number 20030080301
- Publication date May 1, 2003
- George Gammel
- H01 - BASIC ELECTRIC ELEMENTS