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Paul Ashby Loomis
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Georgetown, MA, US
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last 30 patents
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Patent Grant
Continuously variable aperture for high-energy ion implanter
Patent number
6,207,964
Issue date
Mar 27, 2001
Axcelis Technologies, Inc.
Edward K. McIntyre
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method and system for operating a variable aperture in an ion impla...
Patent number
6,194,734
Issue date
Feb 27, 2001
Axcelis Technologies, Inc.
Paul A. Loomis
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
GAS INJECTOR APPARATUS FOR PLASMA APPLICATOR
Publication number
20130146225
Publication date
Jun 13, 2013
MKS Instruments, Inc.
Xing Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...