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Paul b. Silverstein

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  • Somerville, MA, US
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    HIGH-EFFICIENCY TARGET FOR AN ION SOURCE
    • Publication number 20250188592
    • Publication date Jun 12, 2025
    • Axcelis Technologies, Inc.
    • Joshua Abeshaus
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WIRE OR ROD SHAPED EXTRACTION ELECTRODE OPTICS
    • Publication number 20240145213
    • Publication date May 2, 2024
    • Axcelis Technologies, Inc.
    • Neil Colvin
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION SOURCE WITH MULTIPLE BIAS ELECTRODES
    • Publication number 20220367138
    • Publication date Nov 17, 2022
    • Axcelis Technologies, Inc.
    • Wilhelm Platow
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION SOURCE REPELLER
    • Publication number 20220319796
    • Publication date Oct 6, 2022
    • Axcelis Technologies, Inc.
    • Steven T. Drummond
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    STEPPED INDIRECTLY HEATED CATHODE WITH IMPROVED SHIELDING
    • Publication number 20210398765
    • Publication date Dec 23, 2021
    • Axcelis Technologies, Inc.
    • Wilhelm Platow
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    LANTHANATED TUNGSTEN ION SOURCE AND BEAMLINE COMPONETS
    • Publication number 20180358202
    • Publication date Dec 13, 2018
    • Axcelis Technologies, Inc.
    • Neil K. Colvin
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    LANTHANATED TUNGSTEN ION SOURCE AND BEAMLINE COMPONENTS
    • Publication number 20170330725
    • Publication date Nov 16, 2017
    • Axcelis Technologies, Inc.
    • Neil K. Colvin
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION SOURCE REPELLER SHIELD
    • Publication number 20170287579
    • Publication date Oct 5, 2017
    • Axcelis Technologies, Inc.
    • Neil K. Colvin
    • G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
  • Information Patent Application

    ION SOURCE CATHODE SHIELD
    • Publication number 20170207054
    • Publication date Jul 20, 2017
    • Axcelis Technologies, Inc.
    • Neil K. Colvin
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MULTI-PIECE ELECTRODE APERTURE
    • Publication number 20170207057
    • Publication date Jul 20, 2017
    • Axcelis Technologies, Inc.
    • Neil K. Colvin
    • H01 - BASIC ELECTRIC ELEMENTS