Paul b. Silverstein

Person

Somerville, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ion source with multiple bias electrodes
- Patent number 11,545,330
- Issue date Jan 3, 2023
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source repeller
- Patent number 11,521,821
- Issue date Dec 6, 2022
- Axcelis Technologies, Inc.
- Steven T. Drummond
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stepped indirectly heated cathode with improved shielding
- Patent number 11,244,800
- Issue date Feb 8, 2022
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lanthanated tungsten ion source and beamline components
- Patent number 10,535,498
- Issue date Jan 14, 2020
- Axcelis Technologies, Inc.
- Neil K Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source repeller shield comprising a labyrinth seal
- Patent number 10,361,069
- Issue date Jul 23, 2019
- Axcelis Technologies, Inc.
- Neil K. Colvin
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Ion source cathode shield
- Patent number 9,941,087
- Issue date Apr 10, 2018
- Axcells Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-piece electrode aperture
- Patent number 9,870,893
- Issue date Jan 16, 2018
- Axcelis Technologies, Inc.
- Neil K Colvin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WIRE OR ROD SHAPED EXTRACTION ELECTRODE OPTICS
- Publication number 20240145213
- Publication date May 2, 2024
- Axcelis Technologies, Inc.
- Neil Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE WITH MULTIPLE BIAS ELECTRODES
- Publication number 20220367138
- Publication date Nov 17, 2022
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE REPELLER
- Publication number 20220319796
- Publication date Oct 6, 2022
- Axcelis Technologies, Inc.
- Steven T. Drummond
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STEPPED INDIRECTLY HEATED CATHODE WITH IMPROVED SHIELDING
- Publication number 20210398765
- Publication date Dec 23, 2021
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LANTHANATED TUNGSTEN ION SOURCE AND BEAMLINE COMPONETS
- Publication number 20180358202
- Publication date Dec 13, 2018
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LANTHANATED TUNGSTEN ION SOURCE AND BEAMLINE COMPONENTS
- Publication number 20170330725
- Publication date Nov 16, 2017
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE REPELLER SHIELD
- Publication number 20170287579
- Publication date Oct 5, 2017
- Axcelis Technologies, Inc.
- Neil K. Colvin
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
ION SOURCE CATHODE SHIELD
- Publication number 20170207054
- Publication date Jul 20, 2017
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-PIECE ELECTRODE APERTURE
- Publication number 20170207057
- Publication date Jul 20, 2017
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS

Paul b. Silverstein

Person

Patents Grantslast 30 patents

Ion source with multiple bias electrodes

Ion source repeller

Stepped indirectly heated cathode with improved shielding

Lanthanated tungsten ion source and beamline components

Ion source repeller shield comprising a labyrinth seal

Ion source cathode shield

Multi-piece electrode aperture

Patents Applicationslast 30 patents

WIRE OR ROD SHAPED EXTRACTION ELECTRODE OPTICS

ION SOURCE WITH MULTIPLE BIAS ELECTRODES

ION SOURCE REPELLER

STEPPED INDIRECTLY HEATED CATHODE WITH IMPROVED SHIELDING

LANTHANATED TUNGSTEN ION SOURCE AND BEAMLINE COMPONETS

LANTHANATED TUNGSTEN ION SOURCE AND BEAMLINE COMPONENTS

ION SOURCE REPELLER SHIELD

ION SOURCE CATHODE SHIELD

MULTI-PIECE ELECTRODE APERTURE