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Paul BROM
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Eindhoven, NL
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last 30 patents
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Patent Grant
Elastic guiding device, positioning device, blade and lithographic...
Patent number
11,421,729
Issue date
Aug 23, 2022
ASML Netherlands B.V.
Erwin Andreas Bernardus Mulder
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Debris mitigation system, radiation source and lithographic apparatus
Patent number
10,990,015
Issue date
Apr 27, 2021
ASML Netherlands B.V.
Michel Riepen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
APERTURE AND METHOD
Publication number
20250031294
Publication date
Jan 23, 2025
ASML NETHERLANDS B.V.
Roger Anton Marie TIMMERMANS
G01 - MEASURING TESTING
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Patent Application
ELASTIC GUIDING DEVICE, POSITIONING DEVICE, BLADE AND LITHOGRAPHIC...
Publication number
20220082126
Publication date
Mar 17, 2022
ASML NETHERLANDS B.V.
Erwin Andreas Bernardus MULDER
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
Debris Mitigation System, Radiation Source and Lithographic Apparatus
Publication number
20190265594
Publication date
Aug 29, 2019
ASML NETHERLANDS B.V.
Michel RIEPEN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR