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Paul Buettner
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Aalen, DE
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last 30 patents
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Patent Grant
Optical component
Patent number
10,133,183
Issue date
Nov 20, 2018
Carl Zeiss SMT GmbH
Michael Patra
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
OPTICAL SYSTEM, AND METHOD FOR OPERATING AN OPTICAL SYSTEM
Publication number
20230324648
Publication date
Oct 12, 2023
Carl Zeiss SMT GMBH
Andre Dirauf
G02 - OPTICS
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Patent Application
OPTICAL COMPONENT
Publication number
20160370707
Publication date
Dec 22, 2016
Carl Zeiss SMT GMBH
Michael Patra
G02 - OPTICS