Paul D. Horn

Person

Milpitas, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Speed enhancement of chromatic confocal metrology
- Patent number 10,317,344
- Issue date Jun 11, 2019
- KLA-Tencor Corporation
- Paul Horn
- G01 - MEASURING TESTING
Information Patent Grant
Miniaturized imaging apparatus for wafer edge
- Patent number 9,885,671
- Issue date Feb 6, 2018
- KLA-Tencor Corporation
- Paul D. Horn
- G01 - MEASURING TESTING
Information Patent Grant
Line scan knife edge height sensor for semiconductor inspection and...
- Patent number 9,885,656
- Issue date Feb 6, 2018
- KLA-Tencor Corporation
- Shifang Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Variable image field curvature for object inspection
- Patent number 9,752,992
- Issue date Sep 5, 2017
- KLA-Tencor Corporation
- Paul Horn
- G01 - MEASURING TESTING
Information Patent Grant
Wafer edge inspection with trajectory following edge profile
- Patent number 9,719,943
- Issue date Aug 1, 2017
- KLA-Tencor Corporation
- Paul Horn
- G01 - MEASURING TESTING
Information Patent Grant
In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning
- Patent number 9,645,097
- Issue date May 9, 2017
- KLA-Tencor Corporation
- Lena Nicolaides
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Automated inline inspection of wafer edge strain profiles using rap...
- Patent number 9,640,449
- Issue date May 2, 2017
- KLA-Tencor Corporation
- Timothy Goodwin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Speed Enhancement of Chromatic Confocal Metrology
- Publication number 20180067058
- Publication date Mar 8, 2018
- KLA-Tencor Corporation
- Paul HORN
- G01 - MEASURING TESTING
Information Patent Application
ALL SURFACE FILM METROLOGY SYSTEM
- Publication number 20170278236
- Publication date Sep 28, 2017
- KLA-Tencor Corporation
- Shifang Li
- G01 - MEASURING TESTING
Information Patent Application
LINE SCAN KNIFE EDGE HEIGHT SENSOR FOR SEMICONDUCTOR INSPECTION AND...
- Publication number 20160178514
- Publication date Jun 23, 2016
- KLA-Tencor Corporation
- Shifang LI
- G01 - MEASURING TESTING
Information Patent Application
WAFER EDGE INSPECTION WITH TRAJECTORY FOLLOWING EDGE PROFILE
- Publication number 20160091437
- Publication date Mar 31, 2016
- KLA-Tencor Corporation
- Paul HORN
- G01 - MEASURING TESTING
Information Patent Application
IN-LINE WAFER EDGE INSPECTION, WAFER PRE-ALIGNMENT, AND WAFER CLEANING
- Publication number 20150370175
- Publication date Dec 24, 2015
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
Automated Inline Inspection of Wafer Edge Strain Profiles Using Rap...
- Publication number 20150371910
- Publication date Dec 24, 2015
- KLA-Tencor Corporation
- Timothy Goodwin
- G01 - MEASURING TESTING
Information Patent Application
MINIATURIZED IMAGING APPARATUS FOR WAFER EDGE
- Publication number 20150355106
- Publication date Dec 10, 2015
- KLA-Tencor Corporation
- Paul D. Horn
- G01 - MEASURING TESTING
Information Patent Application
VARIABLE IMAGE FIELD CURVATURE FOR OBJECT INSPECTION
- Publication number 20150276616
- Publication date Oct 1, 2015
- KLA-Tencor Corporation
- Paul HORN
- G01 - MEASURING TESTING

Paul D. Horn

Person

Patents Grantslast 30 patents

Speed enhancement of chromatic confocal metrology

Miniaturized imaging apparatus for wafer edge

Line scan knife edge height sensor for semiconductor inspection and...

Variable image field curvature for object inspection

Wafer edge inspection with trajectory following edge profile

In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning

Automated inline inspection of wafer edge strain profiles using rap...

Patents Applicationslast 30 patents

Speed Enhancement of Chromatic Confocal Metrology

ALL SURFACE FILM METROLOGY SYSTEM

LINE SCAN KNIFE EDGE HEIGHT SENSOR FOR SEMICONDUCTOR INSPECTION AND...

WAFER EDGE INSPECTION WITH TRAJECTORY FOLLOWING EDGE PROFILE

IN-LINE WAFER EDGE INSPECTION, WAFER PRE-ALIGNMENT, AND WAFER CLEANING

Automated Inline Inspection of Wafer Edge Strain Profiles Using Rap...

MINIATURIZED IMAGING APPARATUS FOR WAFER EDGE

VARIABLE IMAGE FIELD CURVATURE FOR OBJECT INSPECTION