Paul D. Jackson

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Scottsdale, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Pneumatic polishing head for CMP apparatus
- Patent number 5,643,061
- Issue date Jul 1, 1997
- Integrated Process Equipment Corporation
- Paul David Jackson
- B24 - GRINDING POLISHING
Information Patent Grant
Conditioner for a polishing pad and method therefor
- Patent number 5,456,627
- Issue date Oct 10, 1995
- Westech Systems, Inc.
- Paul D. Jackson
- B24 - GRINDING POLISHING
Information Patent Grant
Semiconductor wafer carrier and method
- Patent number 5,423,558
- Issue date Jun 13, 1995
- IPEC/Westech Systems, Inc.
- Joe E. Koeth
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS