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Paul D. Sonntag
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Colchester, VT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer with design printed outside active region and spaced by desig...
Patent number
8,634,063
Issue date
Jan 21, 2014
International Business Machines Corporation
Robert T. Froebel
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Space tolerance with stitching
Patent number
7,687,210
Issue date
Mar 30, 2010
International Business Machines Corporation
Robert K. Leidy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus to easily measure reticle blind positioning with an expos...
Patent number
7,656,505
Issue date
Feb 2, 2010
International Business Machines Corporation
Robert T. Froebel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Alignment mark system and method to improve wafer alignment search...
Patent number
7,456,966
Issue date
Nov 25, 2008
International Business Machines Corporation
Robert T. Froebel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus to separate field and grid parameters on first...
Patent number
7,171,319
Issue date
Jan 30, 2007
International Business Machines Corporation
Edward W. Conrad
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus to easily measure reticle blind positioning wi...
Patent number
7,005,221
Issue date
Feb 28, 2006
International Business Machines Corporation
Robert T. Froebel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dynamic alignment scheme for a photolithography system
Patent number
6,528,219
Issue date
Mar 4, 2003
International Business Machines Corporation
Edward W. Conrad
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Wafer chuck having a removable insert
Patent number
6,513,796
Issue date
Feb 4, 2003
International Business Machines Corporation
Robert K. Leidy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
More robust alignment mark design
Patent number
6,344,698
Issue date
Feb 5, 2002
International Business Machines Corporation
Roger Lawrence Barr
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Offset alignment marks method and apparatus
Patent number
6,259,164
Issue date
Jul 10, 2001
International Business Machines Corporation
Robert R. Batterson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for making offset alignment marks
Patent number
5,943,587
Issue date
Aug 24, 1999
International Business Machines Corporation
Robert R. Batterson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
WAFER WITH DESIGN PRINTED THEREIN
Publication number
20100090316
Publication date
Apr 15, 2010
International Business Machines Corporation
Robert T. Froebel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SPACE TOLERANCE WITH STITCHING
Publication number
20080315124
Publication date
Dec 25, 2008
Robert K. Leidy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus to easily measure reticle blind positioning with an expos...
Publication number
20060114434
Publication date
Jun 1, 2006
International Business Machines Corporation
Robert T. Froebel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS TO SEPARATE FIELD AND GRID PARAMETERS ON FIRST...
Publication number
20060047456
Publication date
Mar 2, 2006
International Business Machines Corporation
Edward W. Conrad
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ALIGNMENT MARK SYSTEM AND METHOD TO IMPROVE WAFER ALIGNMENT SEARCH...
Publication number
20050156334
Publication date
Jul 21, 2005
International Business Machines Corporation
Robert T. Froebel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus to easily measure reticle blind positioning wi...
Publication number
20040043198
Publication date
Mar 4, 2004
International Business Machines Corporation
Robert T. Froebel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Wafer chuck having a removable insert
Publication number
20020117792
Publication date
Aug 29, 2002
Robert K. Leidy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MORE ROBUST ALIGNMENT MARK DESIGN
Publication number
20020003310
Publication date
Jan 10, 2002
ROGER LAWRENCE BARR
H01 - BASIC ELECTRIC ELEMENTS