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Paul Doyle
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and system for simultaneous tilt and height control of a sub...
Patent number
9,810,619
Issue date
Nov 7, 2017
KLA-Tencor Corporation
Zhongping Cai
G01 - MEASURING TESTING
Information
Patent Grant
Passive position compensation of a spindle, stage, or component exp...
Patent number
8,995,066
Issue date
Mar 31, 2015
KLA-Tencor Corporation
Paul Doyle
G01 - MEASURING TESTING
Information
Patent Grant
Air bearing for substrate inspection device
Patent number
8,817,250
Issue date
Aug 26, 2014
KLA-Tencor Corporation
Paul Doyle
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for improving edge handling chuck aerodynamics
Patent number
8,042,254
Issue date
Oct 25, 2011
KLA-Tencor Corporation
Alexander Belyaev
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Stabilizing a substrate using a vacuum preload air bearing chuck
Patent number
7,607,647
Issue date
Oct 27, 2009
KLA-Tencor Technologies Corporation
Guoheng Zhao
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Patents Applications
last 30 patents
Information
Patent Application
Method and System for Tilt and Height Control of a Substrate Surfac...
Publication number
20140071457
Publication date
Mar 13, 2014
KLA-Tencor Corporation
Zhongping Cai
G01 - MEASURING TESTING
Information
Patent Application
PASSIVE POSITION COMPENSATION OF A SPINDLE, STAGE, OR COMPONENT EXP...
Publication number
20130057855
Publication date
Mar 7, 2013
KLA-Tencor Corporation
Paul Doyle
G02 - OPTICS
Information
Patent Application
AIR FLOW MANAGEMENT IN A SYSTEM WITH HIGH SPEED SPINNING CHUCK
Publication number
20130038866
Publication date
Feb 14, 2013
KLA-Tencor Corporation
George J. Kren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Referenced Inspection Device
Publication number
20120062877
Publication date
Mar 15, 2012
KLA-Tencor Corporation
Paul Doyle
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Referenced Inspection Device
Publication number
20110069306
Publication date
Mar 24, 2011
KLA-Tencor Corporation
Paul Doyle
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STABILIZING A SUBSTRATE USING A VACUUM PRELOAD AIR BEARING CHUCK
Publication number
20080229811
Publication date
Sep 25, 2008
KLA-Tencor Technologies Corporation
Guoheng Zhao
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS