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Paul E. Denham
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Crockett, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Vacuum compatible, high-speed, 2-D mirror tilt stage
Patent number
7,273,289
Issue date
Sep 25, 2007
EUV LLC
Paul E. Denham
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
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Patent Grant
Miniature self-contained vacuum compatible electronic imaging micro...
Patent number
6,327,102
Issue date
Dec 4, 2001
The Regents of the University of California
Patrick P. Naulleau
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
Vacuum compatible, high-speed, 2-D mirror tilt stage
Publication number
20060262435
Publication date
Nov 23, 2006
EUV LLC
Paul E. Denham
G02 - OPTICS