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Paul F. MA
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Santa Clara, CA, US
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last 30 patents
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Patent Grant
Reactor system including a gas distribution assembly for use with a...
Patent number
12,006,572
Issue date
Jun 11, 2024
ASM IP Holding B.V.
Xing Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for selective deposition of silicon nitride layer and struct...
Patent number
11,901,175
Issue date
Feb 13, 2024
ASM IP Holding B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming vanadium nitride layer and structure including th...
Patent number
11,885,013
Issue date
Jan 30, 2024
ASM IP Holding B.V.
Giuseppe Alessio Verni
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition of hafnium oxide within a high aspect ratio hole
Patent number
11,791,153
Issue date
Oct 17, 2023
ASM IP Holding B.V.
Jiyeon Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer treatment for achieving defect-free self-assembled monolayers
Patent number
11,735,420
Issue date
Aug 22, 2023
Applied Materials, Inc.
Chang Ke
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for depositing molybdenum layers using an underlayer
Patent number
11,674,220
Issue date
Jun 13, 2023
ASM IP Holding B.V.
Paul Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Doping control of metal nitride films
Patent number
11,587,829
Issue date
Feb 21, 2023
Applied Materials, Inc.
Annamalai Lakshmanan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for enhancing selectivity in SAM-based selective deposition
Patent number
11,515,155
Issue date
Nov 29, 2022
Applied Materials, Inc.
Chang Ke
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for selective deposition of silicon nitride layer and struct...
Patent number
11,424,119
Issue date
Aug 23, 2022
ASM IP Holding B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for high reflectivity aluminum layers
Patent number
11,421,318
Issue date
Aug 23, 2022
Applied Materials, Inc.
Jacqueline Wrench
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for providing uniform flow of gas
Patent number
RE48994
Issue date
Mar 29, 2022
Applied Materials, Inc.
Joseph Yudovsky
Information
Patent Grant
Apparatus for depositing metal films with plasma treatment
Patent number
11,133,155
Issue date
Sep 28, 2021
Applied Materials, Inc.
Daping Yao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and materials for modifying the threshold voltage of metal...
Patent number
11,049,722
Issue date
Jun 29, 2021
Applied Materials, Inc.
Siddarth Krishnan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for cryogenic gas stream assisted SAM-based s...
Patent number
11,033,930
Issue date
Jun 15, 2021
Applied Materials, Inc.
Chang Ke
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tuning work function of p-metal work function films through vapor d...
Patent number
11,018,009
Issue date
May 25, 2021
Applied Materials, Inc.
Guoqiang Jian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Counter-flow multi inject for atomic layer deposition chamber
Patent number
10,982,326
Issue date
Apr 20, 2021
Applied Materials, Inc.
Dien-Yeh Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for enhancing selectivity in SAM-based selective deposition
Patent number
10,950,433
Issue date
Mar 16, 2021
Applied Materials, Inc.
Chang Ke
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for forming a metal silicide interconnection nanowire struc...
Patent number
10,930,472
Issue date
Feb 23, 2021
Applied Materials, Inc.
Bencherki Mebarki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Doping control of metal nitride films
Patent number
10,910,263
Issue date
Feb 2, 2021
Applied Materials, Inc.
Annamalai Lakshmanan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of reducing or eliminating defects in tungsten film
Patent number
10,879,081
Issue date
Dec 29, 2020
Applied Materials, Inc.
Guoqiang Jian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Doped tantalum nitride for copper barrier applications
Patent number
10,784,157
Issue date
Sep 22, 2020
Applied Materials, Inc.
Annamalai Lakshmanan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer treatment for achieving defect-free self-assembled monolayers
Patent number
10,770,292
Issue date
Sep 8, 2020
Applied Materials, Inc.
Chang Ke
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of increasing selectivity for selective etch processes
Patent number
10,755,947
Issue date
Aug 25, 2020
Applied Materials, Inc.
Wenyu Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and methods to remove residual precursor inside gas lines...
Patent number
10,752,990
Issue date
Aug 25, 2020
Applied Materials, Inc.
Daping Yao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for depositing dielectric barrier layers and aluminum conta...
Patent number
10,707,122
Issue date
Jul 7, 2020
Applied Materials, Inc.
Sree Rangasai V. Kesapragada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cobalt manganese vapor phase deposition
Patent number
10,665,542
Issue date
May 26, 2020
Applied Materials, Inc.
Sang Ho Yu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for doping engineering and threshold voltage...
Patent number
10,665,450
Issue date
May 26, 2020
Applied Materials, Inc.
Yixiong Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas feedthrough assembly
Patent number
10,640,870
Issue date
May 5, 2020
Applied Materials, Inc.
Daping Yao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Selective deposition defects removal by chemical etch
Patent number
10,643,840
Issue date
May 5, 2020
Applied Materials, Inc.
Jeffrey W. Anthis
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and materials for modifying the threshold voltage of metal...
Patent number
10,615,041
Issue date
Apr 7, 2020
Applied Materials, Inc.
Siddarth Krishnan
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHODS AND APPARATUS FOR SOLID SOURCE REFILL
Publication number
20240191352
Publication date
Jun 13, 2024
ASM IP HOLDING B.V.
Jereld Lee Winkler
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR CLEANING A VESSEL
Publication number
20240165681
Publication date
May 23, 2024
ASM IP HOLDING B.V.
Jereld Lee Winkler
B08 - CLEANING
Information
Patent Application
APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND MET...
Publication number
20240141486
Publication date
May 2, 2024
ASM IP HOLDING B.V.
Hannu Huotari
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
REACTANT DELIVERY SYSTEM AND REACTOR SYSTEM INCLUDING SAME
Publication number
20240133033
Publication date
Apr 25, 2024
ASM IP HOLDING B.V.
Jacqueline Wrench
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING STRUCTURE INCLUDING A DOPED ADHESION FILM
Publication number
20230349040
Publication date
Nov 2, 2023
ASM IP HOLDING B.V.
Moataz Bellah Mousa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD TO REDUCE BENDING OF FEATURES ON A SURFACE OF A SUBSTRATE AN...
Publication number
20230343596
Publication date
Oct 26, 2023
ASM IP HOLDING B.V.
Jaebeom Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR DEPOSITING MOLYBDENUM LAYERS
Publication number
20230279539
Publication date
Sep 7, 2023
ASM IP HOLDING B.V.
Paul Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS FOR FORMING A SEMICONDUCTOR STRUCTURE INCLUDING A DIPOLE LAYER
Publication number
20230215728
Publication date
Jul 6, 2023
ASM IP HOLDING B.V.
Paul Ma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REMOTE SOLID SOURCE REACTANT DELIVERY SYSTEMS FOR VAPOR DEPOSITION...
Publication number
20230175127
Publication date
Jun 8, 2023
ASM IP HOLDING B.V.
Todd Dunn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
REACTANT VAPOR DELIVERY SYSTEMS FOR SEMICONDUCTOR PROCESSING TOOLS...
Publication number
20230175126
Publication date
Jun 8, 2023
ASM IP HOLDING B.V.
Jianqiu Huang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METAL-ON-METAL DEPOSITION METHODS FOR FILLING A GAP FEATURE ON A SU...
Publication number
20230160057
Publication date
May 25, 2023
ASM IP HOLDING B.V.
Jiyeon Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METAL-ON-METAL DEPOSITION METHODS FOR FILLING A GAP FEATURE ON A SU...
Publication number
20230163028
Publication date
May 25, 2023
ASM IP HOLDING B.V.
Salvatore Luiso
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS-PHASE REACTOR SYSTEM AND METHOD OF CLEANING SAME
Publication number
20230089167
Publication date
Mar 23, 2023
ASM IP HOLDING B.V.
Jianqiu Huang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND MET...
Publication number
20220403513
Publication date
Dec 22, 2022
ASM IP HOLDING B.V.
Jereld Lee Winkler
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
REACTOR SYSTEM AND METHOD FOR FORMING A LAYER COMPRISING INDIUM GAL...
Publication number
20220403516
Publication date
Dec 22, 2022
ASM IP HOLDING B.V.
Paul Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR SELECTIVE DEPOSITION OF SILICON NITRIDE LAYER AND STRUCT...
Publication number
20220351958
Publication date
Nov 3, 2022
ASM IP HOLDING B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
REACTOR SYSTEMS AND METHODS FOR CLEANING REACTOR SYSTEMS
Publication number
20220349051
Publication date
Nov 3, 2022
ASM IP HOLDING B.V.
Amit Mishra
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND SYSTEM FOR DEPOSITING MOLYBDENUM LAYERS
Publication number
20220018016
Publication date
Jan 20, 2022
ASM IP HOLDING B.V.
Paul Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND SYSTEM FOR FORMING STRUCTURES INCLUDING TRANSITION METAL...
Publication number
20220018025
Publication date
Jan 20, 2022
ASM IP HOLDING B.V.
Paul Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEM AND METHODS FOR DIRECT LIQUID INJECTION OF VANADIUM PRECURSORS
Publication number
20210371978
Publication date
Dec 2, 2021
ASM IP HOLDING B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods and Apparatus for Cryogenic Gas Stream Assisted SAM-based S...
Publication number
20210283650
Publication date
Sep 16, 2021
Applied Materials, Inc.
Chang Ke
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
DEPOSITION OF HAFNIUM OXIDE WITHIN A HIGH ASPECT RATIO HOLE
Publication number
20210249263
Publication date
Aug 12, 2021
ASM IP HOLDING B.V.
Jiyeon Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods For Enhancing Selectivity In Sam-Based Selective Deposition
Publication number
20210217615
Publication date
Jul 15, 2021
Applied Materials, Inc.
Chang Ke
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING VANADIUM NITRIDE LAYER AND STRUCTURE INCLUDING TH...
Publication number
20210180184
Publication date
Jun 17, 2021
ASM IP HOLDING B.V.
Giuseppe Alessio Verni
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Doping Control of Metal Nitride Films
Publication number
20210159118
Publication date
May 27, 2021
Applied Materials, Inc.
Annamalai Lakshmanan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REACTOR SYSTEM INCLUDING A GAS DISTRIBUTION ASSEMBLY FOR USE WITH A...
Publication number
20210102292
Publication date
Apr 8, 2021
ASM IP HOLDING B.V.
Xing Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILL VESSELS AND CONNECTORS FOR CHEMICAL SUBLIMATORS
Publication number
20210071301
Publication date
Mar 11, 2021
ASM IP HOLDING B.V.
Paul Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER TREATMENT FOR ACHIEVING DEFECT-FREE SELF-ASSEMBLED MONOLAYERS
Publication number
20200402792
Publication date
Dec 24, 2020
Applied Materials, Inc.
Chang Ke
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR SELECTIVE DEPOSITION OF SILICON NITRIDE LAYER AND STRUCT...
Publication number
20200286726
Publication date
Sep 10, 2020
ASM IP HOLDING B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods And Materials For Modifying The Threshold Voltage Of Metal...
Publication number
20200234959
Publication date
Jul 23, 2020
Applied Materials, Inc.
Siddarth Krishnan
H01 - BASIC ELECTRIC ELEMENTS