Paul F. Petric

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Swampscott, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam lithography machine incorporating localized v...
- Patent number 4,607,167
- Issue date Aug 19, 1986
- Varian Associates, Inc.
- Paul F. Petric
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Envelope apparatus for localized vacuum processing
- Patent number 4,584,479
- Issue date Apr 22, 1986
- Varian Associates, Inc.
- John R. Lamattina
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Apparatus for positioning a workpiece in a localized vacuum process...
- Patent number 4,560,880
- Issue date Dec 24, 1985
- Varian Associates, Inc.
- Paul F. Petric
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gap control system for localized vacuum processing
- Patent number 4,528,451
- Issue date Jul 9, 1985
- Varian Associates, Inc.
- Paul F. Petric
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Localized vacuum processing apparatus
- Patent number 4,524,261
- Issue date Jun 18, 1985
- Varian Associates, Inc.
- Paul F. Petric
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam exposure system utilizing variable line scan
- Patent number 4,469,950
- Issue date Sep 4, 1984
- Varian Associates, Inc.
- Norman J. Taylor
- B82 - NANO-TECHNOLOGY