Paul Frank Luehrmann

Person

Santa Fe, NM, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 11,525,786
- Issue date Dec 13, 2022
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 10,955,353
- Issue date Mar 23, 2021
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 10,241,055
- Issue date Mar 26, 2019
- ASML Netherlands B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 8,760,662
- Issue date Jun 24, 2014
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 8,553,230
- Issue date Oct 8, 2013
- ASML Netherlands B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 8,054,467
- Issue date Nov 8, 2011
- ASML Netherlands B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 7,791,732
- Issue date Sep 7, 2010
- ASML Netherlands B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic processing cell, lithographic apparatus, track and dev...
- Patent number 7,679,715
- Issue date Mar 16, 2010
- ASML Netherlands B.V.
- Stefan Geerte Kruijswijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic processing cell, lithographic apparatus, track and dev...
- Patent number 7,403,259
- Issue date Jul 22, 2008
- ASML Netherlands B.V.
- Stefan Geerte Kruijswijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device inspection method and apparatus using an asymmetric marker
- Patent number 7,112,813
- Issue date Sep 26, 2006
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Method and Apparatus for Angular-Resolved Spectroscopic Lithography...
- Publication number 20210208083
- Publication date Jul 8, 2021
- ASML NETHERLANDS B.V.
- Arie Jeffrey DEN BOEF
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Angular-Resolved Spectroscopic Lithography...
- Publication number 20190170657
- Publication date Jun 6, 2019
- ASML NETHERLANDS B.V.
- Arie Jeffrey Maria DEN BOEF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Apparatus for Angular-Resolved Spectroscopic Lithography...
- Publication number 20140233025
- Publication date Aug 21, 2014
- ASML NETHERLANDS B.V.
- Arie Jeffrey Maria DEN BOEF
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Angular-Resolved Spectroscopic Lithography...
- Publication number 20140055788
- Publication date Feb 27, 2014
- ASML NETHERLANDS B.V.
- Arie Jeffrey Maria DEN BOEF
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Angular-Resolved Spectroscopic Lithography...
- Publication number 20120038929
- Publication date Feb 16, 2012
- ASML NETHERLANDS B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for angular-resolved spectroscopic lithography...
- Publication number 20110007314
- Publication date Jan 13, 2011
- ASML NETHERLANDS B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING
Information Patent Application
Lithographic processing cell, lithographic apparatus, track and dev...
- Publication number 20080266538
- Publication date Oct 30, 2008
- ASML NETHERLANDS B.V.
- Stefan Geerte Kruijswijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for angular-resolved spectroscopic lithography...
- Publication number 20060066855
- Publication date Mar 30, 2006
- ASML NETHERLANDS B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING
Information Patent Application
Lithographic processing cell, lithographic apparatus, track and dev...
- Publication number 20050206868
- Publication date Sep 22, 2005
- ASML NETHERLANDS B.V.
- Stefan Geerte Kruijswijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device inspection
- Publication number 20040129900
- Publication date Jul 8, 2004
- Arie Jeffrey Den Boef
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Paul Frank Luehrmann

Person

Patents Grantslast 30 patents

Method and apparatus for angular-resolved spectroscopic lithography...

Method and apparatus for angular-resolved spectroscopic lithography...

Method and apparatus for angular-resolved spectroscopic lithography...

Method and apparatus for angular-resolved spectroscopic lithography...

Method and apparatus for angular-resolved spectroscopic lithography...

Method and apparatus for angular-resolved spectroscopic lithography...

Method and apparatus for angular-resolved spectroscopic lithography...

Lithographic processing cell, lithographic apparatus, track and dev...

Lithographic processing cell, lithographic apparatus, track and dev...

Device inspection method and apparatus using an asymmetric marker

Patents Applicationslast 30 patents

Method and Apparatus for Angular-Resolved Spectroscopic Lithography...

Method and Apparatus for Angular-Resolved Spectroscopic Lithography...

Method and Apparatus for Angular-Resolved Spectroscopic Lithography...

Method and Apparatus for Angular-Resolved Spectroscopic Lithography...

Method and Apparatus for Angular-Resolved Spectroscopic Lithography...

Method and apparatus for angular-resolved spectroscopic lithography...

Lithographic processing cell, lithographic apparatus, track and dev...

Method and apparatus for angular-resolved spectroscopic lithography...

Lithographic processing cell, lithographic apparatus, track and dev...

Device inspection