Paul Frank Luehrmann

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Lithography system and a machine learning controller for such a lit...
- Patent number 9,971,251
- Issue date May 15, 2018
- ASML Netherlands B.V.
- Emil Peter Schmitt-Weaver
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of calibrating a lithographic apparatus, device manufacturin...
- Patent number 9,715,181
- Issue date Jul 25, 2017
- ASML Netherlands B.V.
- Emil Peter Schmitt-Weaver
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of operating a lithographic apparatus, device manufacturing...
- Patent number 9,507,279
- Issue date Nov 29, 2016
- ASML Netherlands B.V.
- Emil Peter Schmitt-Weaver
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHY SYSTEM AND A MACHINE LEARNING CONTROLLER FOR SUCH A LIT...
- Publication number 20160170311
- Publication date Jun 16, 2016
- ASML NETHERLANDS B.V.
- Emil Peter SCHMITT-WEAVER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF CALIBRATING A LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURIN...
- Publication number 20140168620
- Publication date Jun 19, 2014
- ASML NETHERLANDS B.V.
- Emil Peter SCHMITT-WEAVER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of Operating a Lithographic Apparatus, Device Manufacturing...
- Publication number 20140168627
- Publication date Jun 19, 2014
- ASML NETHERLANDS B.V.
- Emil Peter SCHMITT-WEAVER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY