Membership
Tour
Register
Log in
Paul Franzen
Follow
Person
West Linn, OR, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method for RF compensation in plasma assisted atomic layer deposition
Patent number
9,624,578
Issue date
Apr 18, 2017
Lam Research Corporation
Jun Qian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR RF COMPENSATION IN PLASMA ASSISTED ATOMIC...
Publication number
20160090650
Publication date
Mar 31, 2016
LAM RESEARCH CORPORATION
Jun Qian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...