Paul George Harris

Person

Haverhill, GB

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus support
- Patent number 8,006,950
- Issue date Aug 30, 2011
- Vistec Lithography Inc.
- Paul George Harris
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Substrate loading and unloading apparatus
- Patent number 7,783,377
- Issue date Aug 24, 2010
- Leica Microsystems Lithography
- Paul Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cooling of a device for influencing an electron beam
- Patent number 6,998,621
- Issue date Feb 14, 2006
- Leica Microsystems Lithography Ltd.
- Paul George Harris
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS SUPPORT
- Publication number 20100102196
- Publication date Apr 29, 2010
- VISTEC LITHOGRAPHY INC.
- Paul George Harris
- B82 - NANO-TECHNOLOGY
Information Patent Application
REDUCTION IN STAGE MOVEMENT REACTION FORCE IN AN ELECTRON BEAM LITH...
- Publication number 20100096567
- Publication date Apr 22, 2010
- VISTEC LITHOGRAPHY INC.
- Paul George Harris
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS SUPPORT STRUCTURE
- Publication number 20100044546
- Publication date Feb 25, 2010
- VISTEC LITHOGRAPHY INC.
- Paul George Harris
- B82 - NANO-TECHNOLOGY
Information Patent Application
COMPONENT MOUNTING IN MOVEMENT-SENSITIVE EQUIPMENT
- Publication number 20090231594
- Publication date Sep 17, 2009
- VISTEC LITHOGRAPHY INC.
- Paul George Harris
- B82 - NANO-TECHNOLOGY
Information Patent Application
Stage for a workpiece
- Publication number 20050073203
- Publication date Apr 7, 2005
- Leica Microsystems Lithography Ltd.
- Paul Harris
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Cooling of a device for influencing an electron beam
- Publication number 20040144931
- Publication date Jul 29, 2004
- Leica Microsystems Lithography Ltd.
- Paul George Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate loading and unloading apparatus
- Publication number 20040037676
- Publication date Feb 26, 2004
- Paul Harris
- H01 - BASIC ELECTRIC ELEMENTS

Paul George Harris

Person

Patents Grantslast 30 patents

Apparatus support

Substrate loading and unloading apparatus

Cooling of a device for influencing an electron beam

Patents Applicationslast 30 patents

APPARATUS SUPPORT

REDUCTION IN STAGE MOVEMENT REACTION FORCE IN AN ELECTRON BEAM LITH...

APPARATUS SUPPORT STRUCTURE

COMPONENT MOUNTING IN MOVEMENT-SENSITIVE EQUIPMENT

Stage for a workpiece

Cooling of a device for influencing an electron beam

Substrate loading and unloading apparatus