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Paul Graupner
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Aalen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,285,685
Issue date
Mar 15, 2016
ASML NETHERLANDS B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure system and projection exposure method
Patent number
9,146,475
Issue date
Sep 29, 2015
Carl Zeiss SMT GmbH
Paul Gräupner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,570,486
Issue date
Oct 29, 2013
ASML Netherlands B.V.
Johannes Catharinus Hubertus Mulkens
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,472,006
Issue date
Jun 25, 2013
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,174,674
Issue date
May 8, 2012
ASML Netherlands B.V.
Johannes Catharinus Hubertus Mulkens
G02 - OPTICS
Information
Patent Grant
Optical element for correction of aberration, and a lithographic ap...
Patent number
7,715,107
Issue date
May 11, 2010
ASML Netherlands B.V.
Erik Roelof Loopstra
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,545,481
Issue date
Jun 9, 2009
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,433,015
Issue date
Oct 7, 2008
ASML Netherlands B.V.
Johannes Catharinus Hubertus Mulkens
G02 - OPTICS
Information
Patent Grant
Method for optimizing the image properties of at least two optical...
Patent number
7,301,622
Issue date
Nov 27, 2007
Carl Zeiss SMT AG
Bernd Geh
G01 - MEASURING TESTING
Information
Patent Grant
Method for optimizing the image properties of at least two optical...
Patent number
6,934,011
Issue date
Aug 23, 2005
Carl Zeiss SMT AG
Bernd Geh
G01 - MEASURING TESTING
Information
Patent Grant
Method for optimizing the image properties of at least two optical...
Patent number
6,678,240
Issue date
Jan 13, 2004
Carl Zeiss SMT AG
Bernd Geh
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20140293248
Publication date
Oct 2, 2014
ASML NETHERLANDS B.V.
Bob STREEFKERK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection Exposure System and Projection Exposure Method
Publication number
20130182234
Publication date
Jul 18, 2013
Carl Zeiss SMT GMBH
Paul Graupner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120194790
Publication date
Aug 2, 2012
Carl Zeiss SMT AG
Johannes Catharinus Hubertus Mulkens
G02 - OPTICS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090214986
Publication date
Aug 27, 2009
ASML NETHERLANDS B.V.
Bob STREEFKERK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20090021707
Publication date
Jan 22, 2009
ASML NETHERLANDS B.V.
Johannes Catharinus Hubertus Mulkens
G02 - OPTICS
Information
Patent Application
Method for optimizing the image properties of at least two optical...
Publication number
20080068599
Publication date
Mar 20, 2008
Carl Zeiss SMT AG
Bernd Geh
G02 - OPTICS
Information
Patent Application
Optical element for correction of aberration, and a lithographic ap...
Publication number
20070247605
Publication date
Oct 25, 2007
ASML NETHERLANDS B.V.
Erik Roelof Loopstra
G02 - OPTICS
Information
Patent Application
Method for optimizing the image properties of at least two optical...
Publication number
20050254042
Publication date
Nov 17, 2005
Bernd Geh
G02 - OPTICS
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050179877
Publication date
Aug 18, 2005
ASML NETHERLANDS B.V.
Johannes Catharinus Hubertus Mulkens
G02 - OPTICS
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050110973
Publication date
May 26, 2005
ASML NETHERLANDS B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for optimising the image properties of at least two optical...
Publication number
20040090617
Publication date
May 13, 2004
Bernd Geh
G02 - OPTICS
Information
Patent Application
Method for optimizing the image properties of at least two optical...
Publication number
20030071986
Publication date
Apr 17, 2003
Bernd Geh
G02 - OPTICS