Paul Holzapfel

Person

Mercer, PA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multiprobe detection system for chemical-mechanical planarization tool
- Patent number 6,960,115
- Issue date Nov 1, 2005
- SpeedFam-IPEC Corporation
- Matthew Weldon
- B24 - GRINDING POLISHING
Information Patent Grant
Multiprobe detection system for chemical-mechanical planarization tool
- Patent number 6,805,613
- Issue date Oct 19, 2004
- SpeedFam-IPEC Corporation
- Matthew Weldon
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad conditioning device with cutting elements
- Patent number 6,371,838
- Issue date Apr 16, 2002
- SpeedFam-IPEC Corporation
- Paul Holzapfel
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad conditioning device with cutting elements
- Patent number 6,350,184
- Issue date Feb 26, 2002
- SpeedFam-IPEC Corporation
- Paul Holzapfel
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for conditioning polishing pads utilizing braz...
- Patent number 6,347,981
- Issue date Feb 19, 2002
- SpeedFam-IPEC Corporation
- Paul Holzapfel
- B24 - GRINDING POLISHING
Information Patent Grant
Method for making a polishing apparatus utilizing brazed diamond te...
- Patent number 6,347,982
- Issue date Feb 19, 2002
- SpeedFam-IPEC Corporation
- Paul Holzapfel
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for cleaning workpiece surfaces and monitoring probes dur...
- Patent number 6,217,410
- Issue date Apr 17, 2001
- SpeedFam-IPEC Corporation
- Paul Holzapfel
- B24 - GRINDING POLISHING
Information Patent Grant
Methods for the in-process detection of workpieces in a CMP environ...
- Patent number 5,993,289
- Issue date Nov 30, 1999
- SpeedFam-IPEC Corporation
- Robert F. Allen
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods for the in-process detection of workpieces with a monochrom...
- Patent number 5,961,369
- Issue date Oct 5, 1999
- SpeedFam-IPEC Corp.
- Anthony L. Bartels
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method for cleaning workpiece surfaces and monitoring probes during...
- Patent number 5,958,148
- Issue date Sep 28, 1999
- SpeedFam-IPEC Corporation
- Paul Holzapfel
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and apparatus for detecting removal of thin film layers dur...
- Patent number 5,872,633
- Issue date Feb 16, 1999
- Speedfam Corporation
- Paul Holzapfel
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for conditioning polishing pads utilizing brazed diamond...
- Patent number 5,842,912
- Issue date Dec 1, 1998
- Speedfam Corporation
- Paul Holzapfel
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for the in-process detection of workpieces with a monochr...
- Patent number 5,823,853
- Issue date Oct 20, 1998
- Speedfam Corporation
- Anthony L. Bartels
- G05 - CONTROLLING REGULATING
Information Patent Grant
Apparatus for the in-process detection of workpieces in a CMP envir...
- Patent number 5,733,171
- Issue date Mar 31, 1998
- Speedfam Corporation
- Robert F. Allen
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
Multiprobe detection system for chemical-mechanical planarization tool
- Publication number 20040038624
- Publication date Feb 26, 2004
- Matthew Weldon
- B24 - GRINDING POLISHING
Information Patent Application
METHODS AND APPARATUS FOR THE IN-PROCESS MEASUREMENT OF THIN FILM L...
- Publication number 20010012108
- Publication date Aug 9, 2001
- PAUL HOLZAPFEL
- G01 - MEASURING TESTING

Paul Holzapfel

Person

Patents Grantslast 30 patents

Multiprobe detection system for chemical-mechanical planarization tool

Multiprobe detection system for chemical-mechanical planarization tool

Polishing pad conditioning device with cutting elements

Polishing pad conditioning device with cutting elements

Method and apparatus for conditioning polishing pads utilizing braz...

Method for making a polishing apparatus utilizing brazed diamond te...

Apparatus for cleaning workpiece surfaces and monitoring probes dur...

Methods for the in-process detection of workpieces in a CMP environ...

Methods for the in-process detection of workpieces with a monochrom...

Method for cleaning workpiece surfaces and monitoring probes during...

Methods and apparatus for detecting removal of thin film layers dur...

Apparatus for conditioning polishing pads utilizing brazed diamond...

Apparatus for the in-process detection of workpieces with a monochr...

Apparatus for the in-process detection of workpieces in a CMP envir...

Patents Applicationslast 30 patents

Multiprobe detection system for chemical-mechanical planarization tool

METHODS AND APPARATUS FOR THE IN-PROCESS MEASUREMENT OF THIN FILM L...