Paul Ijmert Scheffers

Person

Delft, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Method for determining a beamlet position and method for determinin...
- Patent number RE49483
- Issue date Apr 4, 2023
- ASML Netherlands B.V.
- Paul IJmert Scheffers
Information Patent Grant
Substrate holding device, method for manufacturing such a device, a...
- Patent number 9,829,804
- Issue date Nov 28, 2017
- Mapper Lithography IP B.V.
- Paul Ijmert Scheffers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged particle lithography system with alignment sensor and beam...
- Patent number 9,665,014
- Issue date May 30, 2017
- Mapper Lithography IP B.V.
- Paul Ijmert Scheffers
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for determining a beamlet position and method for determinin...
- Patent number 9,653,259
- Issue date May 16, 2017
- Mapper Lithography IP B.V.
- Paul IJmert Scheffers
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for determining a beamlet position and method for determinin...
- Patent number 9,613,782
- Issue date Apr 4, 2017
- Mapper Lithography IP B.V.
- Paul IJmert Scheffers
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Device for spot size measurement at wafer level using a knife edge...
- Patent number 9,240,306
- Issue date Jan 19, 2016
- Mapper Lithography IP B.V.
- Jan Andries Meijer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle lithography system with sensor assembly
- Patent number 9,153,415
- Issue date Oct 6, 2015
- Mapper Lithography IP B.V.
- Paul IJmert Scheffers
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR PROCESSING OR IMAGING A SAMPLE
- Publication number 20180033586
- Publication date Feb 1, 2018
- MAPPER LITHOGRAPHY IP BV
- Paul IJmert SCHEFFERS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH SENSOR ASSEMBLY
- Publication number 20150179398
- Publication date Jun 25, 2015
- MAPPER LITHOGRAPHY IP BV
- Paul IJmert Scheffers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DETERMINING A BEAMLET POSITION AND METHOD FOR DETERMININ...
- Publication number 20150155136
- Publication date Jun 4, 2015
- MAPPER LITHOGRAPHY IP BV
- Paul IJmert Scheffers
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH ALIGNMENT SENSOR AND BEAM...
- Publication number 20150109601
- Publication date Apr 23, 2015
- MAPPER LITHOGRAPHY IP BV
- Paul IJmert Scheffers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE FOR SPOT SIZE MEASUREMENT AT WAFER LEVEL USING A KNIFE EDGE...
- Publication number 20150001423
- Publication date Jan 1, 2015
- MAPPER LITHOGRAPHY IP BV
- Jan Andries Meijer
- H01 - BASIC ELECTRIC ELEMENTS

Paul Ijmert Scheffers

Person

Patents Grantslast 30 patents

Method for determining a beamlet position and method for determinin...

Substrate holding device, method for manufacturing such a device, a...

Charged particle lithography system with alignment sensor and beam...

Method for determining a beamlet position and method for determinin...

Method for determining a beamlet position and method for determinin...

Device for spot size measurement at wafer level using a knife edge...

Charged particle lithography system with sensor assembly

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR PROCESSING OR IMAGING A SAMPLE

CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH SENSOR ASSEMBLY

METHOD FOR DETERMINING A BEAMLET POSITION AND METHOD FOR DETERMININ...

CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH ALIGNMENT SENSOR AND BEAM...

DEVICE FOR SPOT SIZE MEASUREMENT AT WAFER LEVEL USING A KNIFE EDGE...