Paul J. Roggemann

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Hopewell Junction, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Dry interface thermal chuck temperature control system for semicond...
- Patent number 5,001,423
- Issue date Mar 19, 1991
- International Business Machines Corporation
- Anthony J. Abrami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY