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Paul J. Timans
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Mountain View, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
System and process for calibrating pyrometers in thermal processing...
Patent number
10,190,915
Issue date
Jan 29, 2019
Mattson Technology, Inc.
Paul Janis Timans
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective reflectivity process chamber with customized wavelength r...
Patent number
9,633,876
Issue date
Apr 25, 2017
Mattson Technology, Inc.
Paul J. Timans
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
System and process for calibrating pyrometers in thermal processing...
Patent number
8,918,303
Issue date
Dec 23, 2014
Mattson Technology, Inc.
Paul Janis Timans
G01 - MEASURING TESTING
Information
Patent Grant
Pulsed processing semiconductor heating methods using combinations...
Patent number
8,837,923
Issue date
Sep 16, 2014
Mattson Technology, Inc.
Paul J. Timans
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method and system for determining optical properties of semiconduct...
Patent number
8,696,197
Issue date
Apr 15, 2014
Mattson Technology, Inc.
Paul Janis Timans
G01 - MEASURING TESTING
Information
Patent Grant
Methods for determining wafer temperature
Patent number
8,668,383
Issue date
Mar 11, 2014
Mattson Technology, Inc.
Paul Janis Timans
G01 - MEASURING TESTING
Information
Patent Grant
System and process for heating semiconductor wafers by optimizing a...
Patent number
8,669,496
Issue date
Mar 11, 2014
Mattson Technology, Inc.
Paul Janis Timans
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Monitoring witness structures for temperature control in RTP systems
Patent number
8,575,521
Issue date
Nov 5, 2013
Mattson Technology, Inc.
Zsolt Nenyei
G05 - CONTROLLING REGULATING
Information
Patent Grant
Rapid thermal processing using energy transfer layers
Patent number
8,557,721
Issue date
Oct 15, 2013
Mattson Technology, Inc.
Paul J. Timans
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and process for calibrating pyrometers in thermal processing...
Patent number
8,296,091
Issue date
Oct 23, 2012
Mattson Technology, Inc.
Paul Janis Timans
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for growing thin oxide films on silicon while...
Patent number
8,236,706
Issue date
Aug 7, 2012
Mattson Technology, Inc.
Bruce W. Peuse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and process for heating semiconductor wafers by optimizing a...
Patent number
8,222,570
Issue date
Jul 17, 2012
Mattson Technology, Inc.
Paul Janis Timans
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for determining wafer temperature
Patent number
8,157,439
Issue date
Apr 17, 2012
Mattson Technology, Inc.
Paul Janis Timans
G01 - MEASURING TESTING
Information
Patent Grant
Method and system for determining optical properties of semiconduct...
Patent number
8,152,365
Issue date
Apr 10, 2012
Mattson Technology, Inc.
Paul Janis Timans
G01 - MEASURING TESTING
Information
Patent Grant
Rapid thermal processing using energy transfer layers
Patent number
8,138,105
Issue date
Mar 20, 2012
Mattson Technology, Inc.
Paul J. Timans
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed processing semiconductor heating methods and associated syst...
Patent number
8,000,587
Issue date
Aug 16, 2011
Mattson Technology, Inc.
Paul J. Timans
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method and system for thermally processing a plurality of wafer-sha...
Patent number
7,977,258
Issue date
Jul 12, 2011
Mattson Technology, Inc.
Zsolt Nenyei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Determining the temperature of silicon at high temperatures
Patent number
7,976,216
Issue date
Jul 12, 2011
Mattson Technology, Inc.
Paul Janis Timans
G01 - MEASURING TESTING
Information
Patent Grant
System and process for calibrating pyrometers in thermal processing...
Patent number
7,957,926
Issue date
Jun 7, 2011
Mattson Technology, Inc.
Paul Janis Timans
G01 - MEASURING TESTING
Information
Patent Grant
Heating configuration for use in thermal processing chambers
Patent number
7,949,237
Issue date
May 24, 2011
Mattson Technology, Inc.
Zion Koren
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System and process for heating semiconductor wafers by optimizing a...
Patent number
7,847,218
Issue date
Dec 7, 2010
Mattson Technology, Inc.
Paul Janis Timans
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Optimizing the thermal budget during a pulsed heating process
Patent number
7,745,762
Issue date
Jun 29, 2010
Mattson Technology, Inc.
Paul Janis Timans
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Selective reflectivity process chamber with customized wavelength r...
Patent number
7,737,385
Issue date
Jun 15, 2010
Mattson Technology, Inc.
Paul J. Timans
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
System and process for calibrating pyrometers in thermal processing...
Patent number
7,734,439
Issue date
Jun 8, 2010
Mattson Technology, Inc.
Paul Janis Timans
G01 - MEASURING TESTING
Information
Patent Grant
Rapid thermal processing using energy transfer layers
Patent number
7,642,205
Issue date
Jan 5, 2010
Mattson Technology, Inc.
Paul J. Timans
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for determining wafer temperature
Patent number
7,543,981
Issue date
Jun 9, 2009
Mattson Technology, Inc.
Paul Janis Timans
G01 - MEASURING TESTING
Information
Patent Grant
System and process for heating semiconductor wafers by optimizing a...
Patent number
7,453,051
Issue date
Nov 18, 2008
Mattson Technology, Inc.
Paul Janis Timans
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for reducing stray light in substrate processi...
Patent number
7,358,462
Issue date
Apr 15, 2008
Mattson Technology, Inc.
Paul Janis Timans
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Pulsed processing semiconductor heating methods using combinations...
Patent number
7,317,870
Issue date
Jan 8, 2008
Mattson Technology, Inc.
Paul J. Timans
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heating configuration for use in thermal processing chambers
Patent number
7,269,343
Issue date
Sep 11, 2007
Mattson Technology, Inc.
Zion Koren
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
System and Process for Calibrating Pyrometers in Thermal Processing...
Publication number
20150092813
Publication date
Apr 2, 2015
Mattson Technology, Inc.
Paul Janis Timans
G01 - MEASURING TESTING
Information
Patent Application
Heating Configuration for Use in Thermal Processing Chambers
Publication number
20140246422
Publication date
Sep 4, 2014
Mattson Technology, Inc.
ZION KOREN
C30 - CRYSTAL GROWTH
Information
Patent Application
System and Process for Calibrating Pyrometers in Thermal Processing...
Publication number
20130028286
Publication date
Jan 31, 2013
Mattson Technology, Inc.
Paul Janis Timans
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND APPARATUS FOR GROWING THIN OXIDE FILMS ON SILICON WHILE...
Publication number
20120298039
Publication date
Nov 29, 2012
Mattson Technology, Inc.
Bruce W. Peuse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and Process For Heating Semiconductor Wafers by Optimizing A...
Publication number
20120252229
Publication date
Oct 4, 2012
Mattson Technology, Inc.
Paul Janis Timans
C30 - CRYSTAL GROWTH
Information
Patent Application
METHOD AND SYSTEM FOR DETERMINING OPTICAL PROPERTIES OF SEMICONDUCT...
Publication number
20120231558
Publication date
Sep 13, 2012
Mattson Technology, Inc.
Paul Janis Timans
G01 - MEASURING TESTING
Information
Patent Application
RAPID THERMAL PROCESSING USING ENERGY TRANSFER LAYERS
Publication number
20120208377
Publication date
Aug 16, 2012
Paul J. Timans
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods For Determining Wafer Temperature
Publication number
20120201271
Publication date
Aug 9, 2012
Mattson Technology, Inc.
Paul Janis Timans
G01 - MEASURING TESTING
Information
Patent Application
PULSED PROCESSING SEMICONDUCTOR HEATING METHODS USING COMBINATIONS...
Publication number
20110236844
Publication date
Sep 29, 2011
Paul J. Timans
C30 - CRYSTAL GROWTH
Information
Patent Application
Heating Configuration For Use in Thermal Processing Chambers
Publication number
20110222840
Publication date
Sep 15, 2011
Zion Koren
C30 - CRYSTAL GROWTH
Information
Patent Application
SYSTEM AND PROCESS FOR CALIBRATING PYROMETERS IN THERMAL PROCESSING...
Publication number
20110216803
Publication date
Sep 8, 2011
MATTSON TECHNOLOGY, INC.
Paul Janis Timans
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM AND METHOD FOR REDUCING OBJECT DEFORMATION DURING A PULSED H...
Publication number
20100252547
Publication date
Oct 7, 2010
Mattson Technology, Inc.
Paul Janis Timans
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND PROCESS FOR CALIBRATING PYROMETERS IN THERMAL PROCESSING...
Publication number
20100232470
Publication date
Sep 16, 2010
Mattson Technology, Inc.
Paul Janis Timans
G01 - MEASURING TESTING
Information
Patent Application
Selective Reflectivity Process Chamber with Customized Wavelength R...
Publication number
20100219174
Publication date
Sep 2, 2010
Paul J. Timans
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR GROWING THIN OXIDE FILMS ON SILICON WHILE...
Publication number
20100151694
Publication date
Jun 17, 2010
Mattson Technology, Inc.
Bruce W. Peuse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Rapid Thermal Processing using Energy Transfer Layers
Publication number
20100099268
Publication date
Apr 22, 2010
Paul J. Timans
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods for Determining Wafer Temperature
Publication number
20090245320
Publication date
Oct 1, 2009
Mattson Technology, Inc.
Paul Janis Timans
G01 - MEASURING TESTING
Information
Patent Application
Monitoring Witness Structures for Temperature Control in RTP Systems
Publication number
20090242543
Publication date
Oct 1, 2009
Zsolt Nenyei
G05 - CONTROLLING REGULATING
Information
Patent Application
Determining the Temperature of Silicon at High Temperatures
Publication number
20090161724
Publication date
Jun 25, 2009
Mattson Technology, Inc.
Paul Janis Timans
G01 - MEASURING TESTING
Information
Patent Application
System and Process for Heating Semiconductor Wafers by Optimizing A...
Publication number
20090098742
Publication date
Apr 16, 2009
Mattson Technology, Inc.
Paul Janis Timans
C30 - CRYSTAL GROWTH
Information
Patent Application
Method and system for thermally processing a plurality of wafer-sha...
Publication number
20080248657
Publication date
Oct 9, 2008
Zsolt Nenyei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pulsed Processing Semiconductor Heating Methods using Combinations...
Publication number
20080069550
Publication date
Mar 20, 2008
Paul J. Timans
C30 - CRYSTAL GROWTH
Information
Patent Application
System and Process for Heating Semiconductor Wafers by Optimizing A...
Publication number
20080050688
Publication date
Feb 28, 2008
Mattson Technology, Inc.
Paul Janis Timans
C30 - CRYSTAL GROWTH
Information
Patent Application
System and process for heating semiconductor wafers by optimizing a...
Publication number
20080008460
Publication date
Jan 10, 2008
Paul Janis Timans
C30 - CRYSTAL GROWTH
Information
Patent Application
Methods for determining wafer temperature
Publication number
20080002753
Publication date
Jan 3, 2008
Mattson Technology, Inc.
Paul Janis Timans
G01 - MEASURING TESTING
Information
Patent Application
Heating Configuration for Use in Thermal Processing Chambers
Publication number
20070297775
Publication date
Dec 27, 2007
Zion Koren
C30 - CRYSTAL GROWTH
Information
Patent Application
Selective reflectivity process chamber with customized wavelength r...
Publication number
20070131671
Publication date
Jun 14, 2007
Paul J. Timans
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and system for determining optical properties of semiconduct...
Publication number
20070020784
Publication date
Jan 25, 2007
Mattson Technology, Inc.
Paul Janis Timans
G01 - MEASURING TESTING
Information
Patent Application
Optimizing the thermal budget during a pulsed heating process
Publication number
20060289433
Publication date
Dec 28, 2006
Mattson Technology, Inc.
Paul Janis Timans
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and method for reducing stray light in substrate processi...
Publication number
20060289434
Publication date
Dec 28, 2006
Paul Janis Timans
H01 - BASIC ELECTRIC ELEMENTS