Paul J. Tompkins

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Fairport, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Variable annular illuminator for photolithographic projection imager
- Patent number 5,757,470
- Issue date May 26, 1998
- General Signal Corporation
- Paul G. Dewa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Variable annular illuminator for photolithographic projection imager
- Patent number 5,452,054
- Issue date Sep 19, 1995
- General Signal Corporation
- Paul G. Dewa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY